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| 1 | Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications显示文摘Graphene’s unparalleled strength,chemical stability,ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro-and nanoelectromechanical systems(MEMS and NEMS).However,the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges,including collapse and rupture of the graphene.We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields.We have demonstrated the manufacture of square graphene membranes with side lengths from 7µm to 110µm,and suspended proof masses consisting of solid silicon cubes that are from 5µm×5µm×16.4µm to 100µm×100µm×16.4µm in size.Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies,and the manufacturing yields of the graphene membranes with suspended proof masses were>90%,with>70%of the graphene membranes having>90%graphene area without visible defects.The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz,with quality factors ranging from 63 to 148.The graphene membranes with suspended proof masses were extremely robust,and were able to withstand indentation forces from an atomic force microscope(AFM)tip of up to~7000nN.The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances. | Xuge Fan Anderson D.Smith Fredrik Forsberg Stefan Wagner Stephan Schroder Sayedeh Shirin Afyouni Akbari Andreas C.Fischer Luis Guillermo Villanueva Mikael Ostling Max C.Lemme Frank Niklaus | 2020 | Microsystems & Nanoengineering2020，6，1： | 4 |
| 2 | Circulating MicroRNA-208b and MicroRNA-499 Reflect Myocardial Damage in Cardiovascular Disease显示文摘 | Maarten F. Corsten Robert Dennert Sylvia Jochems Tatiana Kuznetsova Yvan Devaux Leon Hofstra Daniel R. Wagner Jan A. Staessen Stephane Heymans Blanche Schroen | 2010 | Circulation: Cardiovascular Genetics2010，，6： | 2 |
| 3 | Long-Term Follow-Up of Biopsy-Proven Viral Myocarditis显示文摘 | Stefan Grün Julia Schumm Simon Greulich Anja Wagner Steffen Schneider Oliver Bruder Eva-Maria Kispert Stephan Hill Peter Ong Karin Klingel Reinhardt Kandolf Udo Sechtem Heiko Mahrholdt | 2012 | Journal of the American College of Cardiology2012，，18： | 2 |
| 4 | Modeling carbon footprints across the supply chain显示文摘 | Balan Sundarakani Robert de Souza Mark Goh Stephan M. Wagner Sushmera Manikandan | 2010 | International Journal of Production Economics2010，，： | 2 |
| 5 | Unicyclic graphs with large energy 显示文摘 | Eric Ould Dadah Andriantiana Stephan Wagner | 2011 | ChinaLinear Algebra and Its Applications2011，435，6： | 1 |
| 6 | Extremal trees with respect to Hosoya index and Merrifield-Simmons index显示文摘 | Stephan G Wagner | 2007 | MATCH Commun Math Comput Chem2007，57，1： | 1 |
| 7 | Experimental analysis of the flow field over a novel owl based airfoil显示文摘 | Stephan Kl?n Thomas Bachmann Michael Klaas Hermann Wagner Wolfgang Schr?der | 2009 | Experiments in Fluids2009，，5： | 1 |
| 8 | Industrial Upgrading, Ex- ploitative Innovations and Explorative Innovations 显示文摘 | Arash Azadegan Stephan M Wagner | 2011 | International Journal of Production Economics2011，130，1： | 1 |
| 9 | High-Resolution Measurements at Nucle- ate Boiling of Pure FC-84 and FC-3284 and Its Binary Mixtures 显示文摘 | Wagner E Stephan P | 2009 | JHeat Transfer2009，131，12： | 1 |
| 10 | Extremal trees with respect to Hosoya index and Merrifield-Simmons index显示文摘 | Stephan G Wagner | 2007 | MATCH Commun Math Comput Chem2007，57，1： | 1 |
| 11 | Maxima and Minima of the Hosoya Index and?the?Merrifield-Simmons Index显示文摘 | Stephan Wagner Ivan Gutman | 2010 | Acta Applicandae Mathematicae2010，，3： | 1 |
| 12 | Maxima and Minima of the Hosoya Index and?the?Merrifield-Simmons Index显示文摘 | Stephan Wagner Ivan Gutman | 2010 | Acta Applicandae Mathematicae2010，，3： | 1 |
| 13 | Modeling Carbon Footprints Across the Supply Chain显示文摘 | Sundarakani Balan Souza Robert de Goh Mark Wagner Stephan M Manikandan Sushmera | 2010 | International Journal of Production Economics2010，，128： | 1 |
| 14 | Modeling carbon footprints across the supply chain显示文摘 | Balan Sundarakani Robert de Souza Mark Goh Stephan M. Wagner Sushmera Manikandan | 2010 | International Journal of Production Economics2010，，1： | 1 |
| 15 | Experimental analysis of the flow field over a novel owl based airfoil显示文摘 | Stephan Kl?n Thomas Bachmann Michael Klaas Hermann Wagner Wolfgang Schr?der | 2009 | Experiments in Fluids2009，，5： | 1 |
| 16 | Industrial Upgrading Exploita-rive Innovations and Explorative Innovations 显示文摘 | Arash Azadegan Stephan M Wagner | 2011 | International Jour- nal of Production Economics2011，130，1： | 1 |
| 17 | Modeling carbon footprints across the supply chain显示文摘 | Balan Sundarakani Robert de Souza Mark Goh Stephan M. Wagner Sushmera Manikandan | 2010 | International Journal of Production Economics2010，，1： | 1 |
| 18 | Glacier and runoff changes in the Rukhk catchment, upper Amu-Darya basin until 2050显示文摘 | Wilfried Hagg Martin Hoelzle Stephan Wagner Elisabeth Mayr Zbynek Klose | 2013 | Global and Planetary Change2013，，： | 1 |
| 19 | Industrial Upgrading, Exploitative inno- vations and Explorative Innovations 显示文摘 | Arash Azadegan Stephan M Wagner | 2011 | Int J Production Economics2011，，130： | 1 |
| 20 | An empirical examination of supply chain performance along several dimensions of risk显示文摘 | STEPHAN M WAGNER CHRISTOPH BODE | 2008 | Journal of Business Logistics2008，29，1： | 1 |
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