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| 1 | Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints显示文摘The success of microelectromechanical systems (MEMS) as a key technology in the 21st century depends in no small part on the solution of materials issues associated with the design and fabrication of complex MEMS devices. The reliable mechanical properties of these thin films are critical to the safety and functioning of these microdevices and should be accurately determined. In order to accomplish a reliable mechanical design of MEMS, a new microtensile test device using a magnetic-solenoid force actuator was developed to evaluate the mechanical properties of microfabricated polysilicon thin films with dimensions of 100—660 mm length, 20—200 mm width, and 2.4 mm thickness. It was found that the measured average value of Young抯 modulus, 164±1.2 GPa, falls within the theoretical bounds. The average fracture strength is 1.36 GPa with a standarddeviation of 0.14 GPa, and the Weibull modulus is 10.4—11.7, respectively. Statistical analysis of the specimen size effect on the tensile strength predicated the size effect on the length, the surface area and the volume of the specimens due tomicrostructural and dimensional constraints. The fracturestrength increases with the increase of the ratio of surfacearea to volume. In such cases the size effect can be tracedback to the ratio of surface area to volume as the governing parameter. The test data account for the uncertainties inmechanical properties and may be used in the future reliability design of polysilicon MEMS. The testing of 40specimens to failure results in a recommendation for design that the nominal strain be maintained below 0.0057. | Ding, JN Meng, YG Wen, SH | 2001 | Chinese Science Bulletin2001，46，16： | 2 |
| 2 | Use of human menopausal gonadotropins in the treatment of endometrial defects associated with recurrent miscarriage:Preliminary report显示文摘 | Ding SH Anstie B | 2001 | Fertil Steril2001，75，20： | 1 |
| 3 | Glucose and insulin components of the metabolic syndrome are associated with hyperandrogenism in postmenopausal women:the atherosclerosis risk in communitiesstudy显示文摘 | Golden SH Ding J Szklo M | 2004 | Am J Epidemiol2004，160，6： | 1 |
| 4 | Angiopoietin-like 4 protein elevates the prosurvival intracellular O2 -:H2O2 ratio and confers anoikis resistance to tumors显示文摘 | Zhu P Tan MJ Huang RL Tan CK Chong HC Pal M Lam CR Boukamp P Pan JY Tan SH Kersten S Li HY Ding JL Tan NS | | 0，，03： | 1 |
| 5 | Hampering immune suppressors: therapeutic targeting of myeloid-derived suppressor ceils in cancer 显示文摘 | Albeituni SH Ding C Yan J | 2013 | Cancer J2013，19，6： | 1 |
| 6 | Research on inverse model based on ANN and analytic method for induction motor显示文摘 | DING SH WU Q H | 2011 | 5(4): 356-3702011，5，4： | 1 |
| 7 | Up-regulation of functional lymphocytes in sepsis 显示文摘 | Ding Z Jia SH Marshall JC CXCR4 expression on human | 2006 | Crit Care Med2006，34，12： | 1 |
| 8 | Long-term effect of chemical fertilizer, straw, and manure on soil chemical and biological properties in northwest China显示文摘 | Liu E Yan C Mei X He W Bing SH Ding L Liu Q Liu S Fan T | 2010 | Geoderrna2010，158，： | 1 |
| 9 | The effects of summer temperature and heat waves on heat-related illness in a coastal city of China,2011- 2013 显示文摘 | Bai L Ding GQ Gu SH | 2014 | Environ Res2014，132，： | 1 |
| 10 | A speed control for a PMSM using finite-time feedback control and disturbance compensation 显示文摘 | Li SH Liu HX Ding SH | 2010 | Transactions of the Institute of Measurement and Control2010，32，2： | 1 |
| 11 | Clinical value of endoscopic he- mostasis in acute non-variceal upper gastrointestinal bleeding 显示文摘 | Zhang J Zhang JY Ding SH | 2012 | Journal of Peking University (Health science)2012，44，4： | 1 |
| 12 | Queuing theory for semiconductor manufacturing systems: a survey and open problems显示文摘 | SHANTHIKUMAR J G DING SH W ZHANG M T | 2007 | IEEE Transactions on Automation Science and Engineering2007，4，4： | 1 |
| 13 | Role of mitochondrial pathway in compression-induced apoptosis of nucleus pulposus cells 显示文摘 | Ding F Shao ZW Yang SH | 2012 | Apoptosis2012，17，6： | 1 |
| 14 | Non-invasive assessment of liver fibrosis in a rat model : shear wave elasticity imaging versus real-time elastography 显示文摘 | LIN SH DING H MAO F | 2013 | Ultrasound Med Biol2013，39，7： | 1 |
| 15 | Role of mitochondrial pathway in compression-induce dapoptosis of nucleus pulposus cells 显示文摘 | Ding F Shao ZW Yang SH | 2012 | Apoptosis2012，17，6： | 1 |
| 16 | Enhanced differentiation and clonogenicity of human endometrial polyp stem cells显示文摘 | Ding DC Chu TY Chiou SH | | 0，，03： | 1 |
| 17 | Characterization of phospho-proteins in gastric cancer secretome 显示文摘 | Yah GR Ding W Xu SH | 2011 | OMICS2011，15，12： | 1 |
| 18 | Predictors of early postoper- ative pain after stapled haemorrhoidopexy 显示文摘 | Zhao Y Ding JH Yin SH | 2014 | Coloreetal Dis2014，16，6： | 1 |
| 19 | Enhanced differentiation and clonogenicity of human endometrial polyp stem cells显示文摘 | Ding DC Chu TY Chiou SH | 2011 | Differentiation2011，81，3： | 1 |
| 20 | irrtnane suppressors: ttie targeting of myeloid-derived suppressor cells in cancer显示文摘 | Albeituni SH Ding C Yah J | 2013 | Cancer J2013，19，6： | 1 |
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