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| 1 | Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers显示文摘MEMS-based micro speakers are attractive candidates as sound transducers for smart devices,particularly wearables and hearables.For such devices,high sound pressure levels,low harmonic distortion and low power consumption are required for industrial,consumer and medical applications.The ability to integrate with microelectronic circuitry,as well as scalable batch production to enable low unit costs,are the key factors benchmarking a technology.The Nanoscopic Electrostatic Drive based,novel micro speaker concept presented in this work essentially comprises inplane,electrostatic bending actuators,and uses the chip volume rather than the its surface for sound generation.We describe the principle,design,fabrication,and first characterization results.Various design options and governing equations are given and discussed.In a standard acoustical test setup(ear simulator),a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%,thus proving the concept.Further potential on sound pressure as well as linearity improvement is outlined.We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches. | Bert Kaiser Sergiu Langa Lutz Ehrig Michael Stolz Hermann Schenk Holger Conrad Harald Schenk Klaus Schimmanz David Schuffenhauer | 2019 | Microsystems & Nanoengineering2019，5，1： | 2 |
| 2 | Oxygen uptake in whole-body vibration exercise: influence of vibration frequency, amplitude, and external load显示文摘 | Rittweger J Ehrig J Just K | 2002 | Int J Sports Med2002，23，6： | 1 |
| 3 | A new principle to normalize plasma concentrations allowing single-sample clearance determinations in both children and adults显示文摘 | Bernd Bubeck Rolf Piepenburg Ulrich Grethe Burghard Ehrig Klaus Hahn | 1992 | European Journal of Nuclear Medicine1992，，7： | 1 |
| 4 | Attributed graph transformation with node type inheritance显示文摘 | LARA J BARDOHL R EHRIG H | 2007 | Theoretical Computer Science2007，376，3： | 1 |
| 5 | A component framework based on highlevel replacement systems 显示文摘 | EHRIG H OREJAS F BRAATZ B | 2003 | Electronic Notes in Theoretical Computer Science2003，72，3： | 1 |
| 6 | Pctri net modules in the transformation-based component framework显示文摘 | Padbcrg J Ehrig H | 2006 | Journal of Logic and Algebraic Pro gramming2006，67，12： | 1 |
| 7 | What Is Ontology Merging-A Category-Theoretical Perspective using Pushouts显示文摘 | Hitzler P krotzseh M Ehrig M | 2005 | American Association for Artificial Intelligence2005，，： | 1 |
| 8 | Selectivity Enhancement in the Catalytic Hydrogenation of Propionitrile Using Ionic Liquid Muhiphase Reaction Systems显示文摘 | Obert A Roth D Ehrig M | 2009 | Appl Catal2009，356，1： | 1 |
| 9 | Oxygen uptake in whole-body vibration exercise: influence of vibration frequen- cy, amplitude and external load 显示文摘 | Rittweger J Ehrig J Just K | 2002 | Int J Sports Med2002，23，6： | 1 |
| 10 | Aerosol formation in gas-liquid contact devices-nucleation, growth and particle dynamics显示文摘 | Schabe K Korber J Ofenloch O Ehrig R Deuflhard P | 2002 | Chemical Engineering Science2002，57，20： | 1 |
| 11 | Petri net modules in the transformation-based component framework 显示文摘 | PADBERG J EHRIG H | 2006 | The Journal of Logic and Algebraic Programming2006，67，12： | 1 |
| 12 | Towards graph transformation based generation of visual editors using eclipse显示文摘 | Ehrig K Ermel C Hansgen S | 2005 | Electronic Notes in Theoretical Computer Science2005，127，4： | 1 |
| 13 | A generic approach to connector architectures part I: the general framework显示文摘 | OREJAS F EHRIG H KLEIN M | 2010 | Fundamenta Informaticae2010，99，1： | 1 |
| 14 | Attributed graph transformation with node type inheritance显示文摘 | de Lara J Bardohl R Ehrig H | 2007 | Theoretical Computer Science2007，376，2： | 1 |
| 15 | Predictors of Post- Treatment Weight Reduction after In-Patient Behavioral Therapy显示文摘 | Cuntz U Leibbrand R Ehrig C | 2001 | Int J Obes Relat Metab Disord2001，25，11： | 1 |
| 16 | Alcohol and aldehyde dehydrogenase显示文摘 | Ehrig T Bosron WF Li TK | 1990 | Alcohol1990，25，23： | 1 |
| 17 | Formal analysis of functional behaviour for model transformations based on triple graph grammars显示文摘 | HERMANN F EHRIG H OREJAS F | 2010 | Lecture Notes in Computer Science2010，6372，： | 1 |
| 18 | Modelling znd simulation of aerosol formation by heterogeneous nucleation in gas-liquid contact devices显示文摘 | Ehrig R Ofenloch O Schaber K | 2002 | Chemical Engineering Science2002，57，7： | 1 |
| 19 | Asymptomatic pancreatitis associated with clozapine显示文摘 | Bergemann N Ehrig C Diebold K | 1999 | Pharmacopsychiatry1999，32，2： | 1 |
| 20 | Quantitative amplification of genomic DNA from histological tissue sections after staining with nuclear dyes and laser capture microdissection显示文摘 | Ehrig T Abdulkadir SA Dintzis SM | 2001 | J Mol Diagn2001，3，1： | 1 |
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