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1071篇 您的检索式:期刊名="Journal of Vacuum Science Technology"
    题名 作者 年代 出处 被引量
1Origin of electrical property distribution on the surface of ZnO: Al films prepared by magnetron sputtering 显示文摘Minami T Miyata T Yamamoto T 2000Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films2000,18,:1
2Influence of modeling and simulation on the maturation of plasma technology: Feature evolution and reactor design 显示文摘Graves D B Kushner M J 2003Journal of Vacuum Science Technology2003,21,5:1
3Reclamation of vacuum pump fluids显示文摘Whitman C B 1987Journal of Vacuum Science & Technology1987,5,2:1
4The influence of preparation conditions on the optical properties of titanium nitride based solar control films显示文摘Georgson M Roos A Ribbing C G 1991Journal of Vacuum Science & Technology A (Vacuum Surfaces and Films)1991,9,4:1
5Modified Postannealing of the Ge Condensation Process for Better-strained Si Material and Devices 显示文摘Liu X Y Ma X B Du X F 2010Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures2010,28,5:1
6Microstructure and Bulk Reactivity of the Nonevaporable Getter Zr57V36Fe7显示文摘Günter MM Herein D Schumacher R 1998Journal Vacuum of Science and Technology1998,16,6:1
7Adhesion improvement of plasmadeposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry显示文摘Bertrand N Drevillon B 1998Journal of vacuum science and technology1998,16,1:1
8Screen Printed Carbon Nanotube Field Emitter Array for Lighting Source Application显示文摘Park JH Son GH Moon JS 2005Journal of Vacuum Science & Technology B2005,23,2:1
9Wide dynamic range silicon diaphragm vacuum sens-or by electrostatic servo system显示文摘MIYASHITA H ESASHI M 2000Journal of Vacuum Science & Technology2000,18,6:1
10Carrier Densities in InAs/Ga(Al)Sb(As) Quantum Wells显示文摘Munekata H Esaki L Chang LL 1987Journal of Vacuum Science and Technology B1987,5,3:1
11Cu/Pi and Cu/PET adhesion:influence of Si^+ ion mixing显示文摘GALUSKA A A 1992Journal of Vacuum Science and Technology A1992,10,2:1
12Character- ization of amorphous carbon thin films 显示文摘CAPANO M A SINGH R K QIAN F 1996Journal of Vacuum Science and Technology A1996,14,2:1
13Microstructural features of EB-PVD thermal barrier coatings irradiated by high-intensity pulsed ion beam显示文摘LIU Chen HAN Xiao-guang ZHU Xiao-peng LEI Ming-kai 2008Journal of Vacuum Science and Technology A2008,26,6:1
14Mechanisms of copper removal during chemical mechanical polishing 显示文摘Steigerwald J M Murarka S P Gutmann R J 1995Journal of Vacuum Science and Technology B1995,13,6:1
15Electrical measurements of the conduction band discontinuity of the abrupt Ge-GaAs (100) heterojunction显示文摘Ballingall J M C Wood E C Eastman L F 1983Journal of Vacuum Science & Technology B1983,1,3:1
16Si delta Doping Inside In As/Ga As Quantum Dots with Different Doping Densities显示文摘Wang K F Gu Y Yang X 2012Journal of Vacuum Science&Technology B:Microelectronics and Nanometer Structures2012,30,4:1
17Chemical doping of Hg Cd Te by molecular‐beam epitaxy显示文摘Wu O K Kamath G S Radford W A 1990Journal of Vacuum Science&Technology A Vacuum Surfaces&Films1990,8,2:1
18Ultras- mooth plasma polymerized coatings for laser fusion targets显示文摘LETTS S A MYERS D W WITT L A 1981Journal of Vacuum Science and Technology1981,19,3:1
19Reconstruction of pattern images from scanning electron microscope images显示文摘Feng Hanying Ye Jtm Fabian R 2005Journal of Vacuum Science and Technology2005,23,6:1
20Low temperature crystallization of high permittivity Ta oxide using an Nb oxide thin film for metal/insulator/metal capacitors in dynamic random access memory applications 显示文摘DONGJOON M SUNGHO P BUM-SEOK S CHOI S LEE N LEE J H 2005Journal of Vacuum Science and Technology B2005,23,1:1
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