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83篇 您的检索式：作者名="ESASHI M"

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	题名	作者	年代	出处	被引量
1	Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors 显示文摘	Xu H G Ono T Esashi M	2006	Journal of Micromechanics and Microengineering2006，16，12：	1
2	Three-axis magneto-impedance effect sensor system for detecting position and orientation of eatheter tip 显示文摘	Totsu K Haga Y Esashi M	2004	Sensors and Actuators A2004，111，23：	1
3	Wide dynamic range silicon diaphragm vacuum sens-or by electrostatic servo system显示文摘	MIYASHITA H ESASHI M	2000	Journal of Vacuum Science & Technology2000，18，6：	1
4	Wafer level packaging of MEMS显示文摘	ESASHI M	2008	J Micromech Microeng2008，18，7：	1
5	Acceleration Switch with Extended Holding Time Using Squeeze Film Effect for Side Airbag System显示文摘	Matsunaga T Esashi M	2002	Sensors and Actuators2002，100，1：	1
6	Acceleration switch with extended holding time using squeeze film effect for side airbag systems显示文摘	Matsunaga T Esashi M	2002	Sensors and Actuators A-Physical2002，100，1：	1
7	A novel electrostatic servo capacitive vacuum sensor显示文摘	Wang Yuelin ESASHI M	1997	International Conference on Solid-state Sensors and Actuators1997，，：	1
8	Silicon micromachining for integrated microsystems显示文摘	ESASHI M	1996	Vacuum1996，47，：	1
9	High-speed imaging by electromagnetically actuated probe with dual spring显示文摘	Lee D W Ono T Esashi M	2000	J of MEMS2000，9，4：	1
10	Wide dynamic range siheon diaphragm vacuum sensor by electrostatic servo system 显示文摘	MIYASHITA H ESASHI M	2000	Vac Sci Technol B2000，18，：	1
11	Deep reactive ion etching of Pyrex glass using SF6 plasma显示文摘	Li X H Abe T Esashi M	2001	Sensors and Actuators A2001，87，：	1
12	Energy dissipation in submicrometer thick single-crystal silicon cantilevers 显示文摘	Ono T Esashi M	2002	Journal of Microelectromechanical Systems2002，11，6：	1
13	A bellows-shape electrostatic micro,actuator 显示文摘	MINAMI K MORISHITA H ESASHI M	1999	Sensors and Actuators1999，72，3：	1
14	Macroporous silicon-based deep anisotropic etching显示文摘	Tao Y Esashi M	2005	J Micromech Microeng2005，15，4：	1
15	Deep reactive ion etching of Pyrex glass using SF6 plasma显示文摘	Li X H Abe T Esashi M	2001	Sensors and Actuators A2001，87，：	1
16	Mechanical behavior of ultrathin microcantilever显示文摘	Yang Jinling Ono T Esashi M	2000	Sensors and Actuators2000，82，13：	1
17	Medical and welfare applications of shape memory allow microcoils actuators 显示文摘	Haga Y Mizushima M Matsunaga T and Esashi M	2005	Smart Materials Structures2005，14，5：	1
18	pH ISFETs using Al2O3,Si3N4,and SiO2 gate thin-films显示文摘	Matsuo T Esashi M Abe H		0，，11：	1
19	Microflow Devices and Systems 显示文摘	Shoji S Esashi M	1994	Journal of Micromechanics and Microengineering1994，4，：	1
20	Encapsulated Micro Mechanical Sensors显示文摘	Esashi M	1994	Microsystem Technologies1994，，1：	1

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