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422篇 您的检索式：期刊名="J Micromech Microeng"

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	题名	作者	年代	出处	被引量
1	NavierStokes simulations of gas flow in micro devices 显示文摘	Dai Jie Xu Diao Khoo Boo Cheong	2000	J Micromech Microeng2000，10，：	1
2	Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS显示文摘	Zhang J Tan KL Hong GD	2001	J Micromech Microeng2001，11，1：	1
3	Design and optical performance research of multi-phase diffractive microlens arrays显示文摘	KONG L B YI X J LIAN K	2004	J Micromech Microeng2004，14，8：	1
4	A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves 显示文摘	GERLACH T SCHUENEMANN M WURMUS H	1995	J Micromech Microeng1995，5，1：	1
5	The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator显示文摘	YEOM J FIELD C R BAE B	2008	J Micromech Microeng2008，18，12：	1
6	A high yield rate MEMS gyroscope with a packaged SiOG process显示文摘	M C Lee S J Kang K D Jung S H Choa Y C Cho	2005	J Micromech Microeng2005，15，：	1
7	A novel process for circle-like 3D mierostructures by two-step wet etching显示文摘	Jiang Yurong Liu Guizhen Zhou Jian	2009	J Micromech Microeng2009，19，1：	1
8	Lattice Boltzmann study of three - dimensional gas microchannel flows 显示文摘	Namgyun Jeong Ching - Long Lin Do Hyung Choi	2006	J Micromech Microeng2006，16，：	1
9	Selfaligning gas/liquid micropump显示文摘	Schabmueller C G J Koch M Mokhtari M E	2002	J Micromech Microeng2002，12，：	1
10	A novel isolation technology in bulk micromachining using deep reactive ion etching and a polysilicon refill显示文摘	ZHANG D C LI Z H LI T	2001	J Micromech Microeng2001，11，1：	1
11	A semi-fixed abrasive machining technique 显示文摘	Yuan J L Wang Z W Hong T	2009	J Micromech Microeng2009，19，05：	1
12	Microflow devices and system 显示文摘	Shoji Shuchi Esashi Masayoshi	1994	J Micromech Microeng1994，4，：	1
13	Amplitude-modulated electro-mechanical feedback systems for silicon condenser microphone显示文摘	Van der Donk A G H Scheeper P R Olthuis W	1992	J Micromech Microeng1992，2，3：	1
14	Micromachined pre - focused M × N flow switch for continuous sample injection 显示文摘	Lee G B Hwei B H Huang G R	2001	J Micromech Microeng2001，11，6：	1
15	Micromotor dynamics in lubricating fluids显示文摘	Deng K Ramanathan G P Mehregany M	1994	J Micromech Microeng1994，4，：	1
16	Global optimization and design for microelectromechenical systems devices based on simulated annealing显示文摘	Ong A Tay E H F	2002	J Micromech Microeng2002，12，6：	1
17	Micromachined flow cytometers with embedded etched optic fibers for optical detection 显示文摘	Lin C H Lee G B	2003	J Micromech Microeng2003，13，3：	1
18	A Lateral-Axis MicromachinedTuning Fork Gyroscope with Torsional Z-Sensing and ElectrostaticForce-Balanced Driving 显示文摘	Guo Z Y Yang Z C Zhao Q C	2010	J Micromech Microeng2010，20，02：	1
19	Observation and optical implication of oil dewetting patterns in electrowetting displays 显示文摘	B Sun J Heikenfeld	2008	J Micromech Microeng2008，18，02：	1
20	Wafer level packaging of MEMS显示文摘	ESASHI M	2008	J Micromech Microeng2008，18，7：	1

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