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135篇 您的检索式：期刊名="J Microelectromech Syst"

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	题名	作者	年代	出处	被引量
1	Electrostatic micro torsion mirrors for an optical switch matrix 显示文摘	H Toshiyoshi H Fujita	1996	J Microelectromech Syst1996，5，：	2
2	Fabrication of a mechanical antireflection switch for fiber-to-thehcme systems 显示文摘	Walker J A Goossen K W Amey S C	1996	J Microelectromech Syst1996，，5：	1
3	Feasibility of micro power supplies for MEMS 显示文摘	KOENEMAN P B BUSCH-VISHNIAC I J WOOD K L	1997	J Microelectromech Syst1997，6，4：	1
4	BESOI-based integrated optical silicon accelerometer显示文摘	Dominguez C Esteve J	2004	J Microelectromech Syst2004，13，2：	1
5	Design,modeling,and demonstration of a mems repulsive-force out-of-plane electrostatic micro actuator显示文摘	HE S MRAD R B	2008	J Microelectromech Syst2008，17，3：	1
6	Electrostatic micro-torsion mirrors for an optical switch matrix 显示文摘	Toshiyoshi H Fujita H	1996	J Microelectromech Syst1996，，5：	1
7	Surface Micromachined Paraffin-actuated Microvalve显示文摘	Carlen E T Mastrangelo C H	2002	J Microelectromech Syst2002，11，：	1
8	An electro-thermo-mechanical lumped element model of an electrothermal bimorph actuator显示文摘	Todd S T Xie H	2008	J Microelectromech Syst2008，17，1：	1
9	Micronachined Polysilicon Microscanners for Barcode Readers 显示文摘	Kiang Meng Hsiung Olay Solgaard Richard Mullers	1998	IEEE J Microelectromech Syst1998，，7：	1
10	Vertical focusing device utilizing dielectrophoretic force and its application on microflow cytometer显示文摘	Lin C H Lee G B Fu L M	2004	J Microelectromech Syst2004，13，6：	1
11	A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability显示文摘	Mohammad Faisal Zaman Ajit Sharma Zhili Hao	2008	J Microelectromech Syst2008，17，6：	1
12	A Vacuum Packaged Surface Micromachined Resonant Accelerometer 显示文摘	Seshia A A Palaniapan M Roessig T A	2002	J Microelectromech Syst2002，，11：	1
13	Thermoplastic forming of bulk metallic glass -- A technology for MEMS and micro- structure fabrication显示文摘	Schroers J Pham Q Desai A	2007	J Microelectromech Syst2007，16，2：	1
14	On the dynamic pullin of electrostatic actuators with multiple degrees of freedom and multiple voltage sources 显示文摘	ELATA D BAMBERGER H	2006	IEEE J Microelectromech Syst2006，15，1：	1
15	VHF free-free beam high-Q micromechanical resonators 显示文摘	WANG K WONG A C NGUYEN C T C	2000	J Microelectromech Syst2000，9，3：	1
16	Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes显示文摘	Etxtinc Tatar Said Emre Alper Tayfun Akin	2012	J Microelectromech Syst2012，21，3：	1
17	Heat transfer in microchannel devices using DSMC显示文摘	Liou W W Fang Y C	2001	J Microelectromech Syst2001，10，2：	1
18	Electrochemically driven Polypyrrole bilayers for moving and positioning bulk micromachined silicon plates 显示文摘	Smela E Kallenbach M Holdenried J	1999	IEEE J Microelectromech Syst1999，8，4：	1
19	VHF free-free beam high-Q micromeehanieal resonators 显示文摘	WANG K WONG A C NGUYEN C T C	2000	J Microelectromech Syst2000，9，3：	1
20	A water-powered micro drug delivery system显示文摘	Su Y C Lin L	2003	J Microelectromech Syst2003，13，：	1

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