| 1 | Comparative Analysis of Ti,Ni,and Au Electrodes on Characteristics of TiO_2 Nanofibers for Humidity Sensor Application显示文摘The effect of metal(Ti,Ni,and Au) electrodes on humidity sensing properties of electrospun TiO_2 nanofibers was investigated in this work.The devices were fabricated by evaporating metal contacts on SiO_2 layer thermally grown on silicon substrate.The separation between the electrodes was 90μm for all sensors.The sensors were tested from 40%to 90%relative humidity(RH) by AC electrical characterization at room temperature. When sensors are switched between 40%and 90%RH,the corresponding response and recovery time are 3 s and 5 s for Ti-electrode sensor,4 s and 7 s for Ni-electrode sensor,and 7 s and 13 s for Au-electrode sensor.The hysteresis was 3%,5%and 15%for Ti-,Ni-,and Au-electrode sensor,respectively.The sensitivity of Ti,Ni,and Au-electrode sensors are 7.53 MΩ/%RH,5.29 MΩ/%RH and 4.01 MΩ/%RH respectively at 100 Hz.Therefore Ti-electrode sensor is found to have linear response,fast response and recovery time and higher sensitivity as compared with those of Ni- and Au-electrode sensors.Comparison of humidity sensing properties of sensors with different electrode material may propose a compelling route for designing and optimizing humidity sensors. | S.S.Batool Z.Imran M.Israr Qadir M.Usman H.Jamil M.A Rafiq M.M.Hassan M.Willander | 2013 | Journal of Materials Science & Technology2013，29，5： | 3 |
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