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24篇 您的检索式：作者名="Perkinson T L"

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	题名	作者	年代	出处	被引量
1	Single-wafer Cluster Tool Performance: An analysis of the Effects of Redundant Chambers and Revisitations Sequences on Throughput 显示文摘	T L Perkinson R S Gyumsik P K MacLarty	1996	IEEE Transactions on Semiconductor Manufacturing (S0894-6507)1996，9，3：	1
2	Singlewafer Cluster Tool Performance: An Analysis of Throughput 显示文摘	T L Perkinson P K MacLarty R S Gyurcsik R K Cavin Ⅲ	1994	IEEE Transactions on Semiconductor Manufacturing (S0894-6507)1994，7，3：	1
3	Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitations sequences on throughput 显示文摘	Perkinson T L Gyurcsik R S MacLarty P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，3：	1
4	Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput显示文摘	Perkinson T L Gyurcsik R S MacLarty P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，：	1
5	Single-wafer cluster tool performance: An analysis of throughput显示文摘	Perkinson T L MacLarty P K Gyurcsik R S Cavin R K	1994	IEEE Transactions on Semiconductor Manufacturing1994，7，：	1
6	Single-wafer cluster tool performance: an analysis of the effects of redundant chamhers and revisitation sequences on throughput显示文摘	PERKINSON T L GYURCSIK R S MCLARTY P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，3：	1
7	Single wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation sequences on throughput 显示文摘	PERKINSON T L GYURCSIK R S MCLARTY P Z	1996	IEEE Transaction on Semi- conductor Manufacturing1996，9，3：	1
8	Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput 显示文摘	Perkinson T L Gyurcsik R S Mclarty P K	1996	IEEE Transactions on Semiconductor Manufacturing (S0894-6507)1996，9，3：	1
9	Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput显示文摘	PERKINSON T L GYURCSIK R S MCLARTY P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，3：	1
10	Single-wafer cluster tools performance; an analysis of throughput显示文摘	PERKINSON T L MACLARTY P K GYURCSIK R S	1994	IEEE Transactions on Semiconductor Manu- facturing1994，7，2：	1
11	Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput 显示文摘	Perkinson T L Gyurcsik R S McLarty P K	1996	'iEEE Transactions on Semiconductor Manufacturing1996，9，3：	1
12	Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput 显示文摘	PERKINSON T L GYURCSIK R S MCLARTY P K	1996	IEEE Trans- actions on Semiconductor Manufacturing1996，9，3：	1
13	Singlewafer cluster tool performance: an analysis of throughput 显示文摘	Perkinson T L MacLarty P K Gyurcsik R S	1994	IEEE Transactions on Semiconductor Manufacturing1994，7，3：	1
14	Single-wa- fer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on through- put显示文摘	Perkinson T L Gyurcsik R S McLarty P K	1996	IEEE Transactions on Semiconductor Manufactur- ing1996，9，3：	1
15	Single- wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation se- quences on throughput 显示文摘	Perkinson T L Gyurcsik R S McLarty P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，38：	1
16	Single-wafer cluster tool performance: An analy sis of the effects of redundant chambers and revlsitat显示文摘	PERKINSON T L GYURCSIK R S MCLARTY P K	1996	IEEE Transactions on Semiconductor Manufacturing1996，9，38：	1
17	Single- wafer cluster tool performance: an analysis of throughput显示文摘	PERKINSON T L MACLARTY P K GYURCSIK R S	1994	IEEE Transactions on Semiconductor Manufacturing1994，7，3：	1
18	Singlewafer cluster tool performance: An analysis of the effects of redundant chambers and revisitation sequences on throughput 显示文摘	Perkinson T L Gyurcsik R S MeLarty P K	1996	IEEE Trans Semicond Manufact1996，9，3：	1
19	Single-wafer cluster tool performance: an analysis of throughput 显示文摘	Perkinson T L McLarty P K Gyuresik R S	1994	IEEE Trans Semieond Manufact1994，7，3：	1
20	Single-wafer cluster tool performance: an analysis of throughput 显示文摘	PERKINSON T L MCLARTY P K GYURCSIK R S	1994	IEEE Transactions on Semiconductor Manufacturing1994，7，3：	1

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