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| 1 | 采用双扫描平台技术的ArF浸液式光刻显示文摘在193nm光刻中,已证明水是一种适于浸液式光刻的液体。浸液式光刻提出了一种可将传统的光学光刻拓展到45nm节点,甚至到32nm节点的潜能。另外,利用现有的透镜,浸液式光刻的选择提出了根据实际的数值孔径和特征图形可增大50%及更大的焦深范围。讨论了采用浸液式光刻获得的成像结果和套刻结果。采用一个0.75数值孔径的ArF透镜,我们用双扫描平台技术(TWINSCANTM)组装一台浸液式扫描光刻机的原理型样机。最初的浸液式曝光实验数据证明了焦深的增加较大,同时以高扫描速度保持了图像的对比度。在初期引入的生产型浸液式光刻中,将采用一个0.85数值孔径的ArF透镜。该系统的分辨率将以大于0.5μm的焦深有效地支持65nm节点半导体器件的加工。这种系统初始的成像技术数据证实有效的增大了其焦深范围。 | Jan Mulkens Bob Streefkerk Martin Hoogendorp 童志义 | 2005 | 电子工业专用设备2005，34，2： | 2 |
| 2 | Puns, relevance and appreciation in advertisements显示文摘 | Margot van Mulken Renske van Enschot-van Dijk Hans Hoeken | 2004 | Journal of Pragmatics2004，，5： | 2 |
| 3 | Comarison of lowdose with standard-dose multidetector CT in cervical spine trauma显示文摘 | Mulkens TH Marchal P Daineffe S | 2007 | AJNR2007，2，8： | 1 |
| 4 | Task concentration training and fear of blushing 显示文摘 | Bogels SM Mulkens S de Jong PJ | 1997 | Clinl Psychol Psychother1997，4，4： | 1 |
| 5 | Fear of blushing: Effects of task concentration training versus exposure in vivo on fear and physiology 显示文摘 | Mulkens S Bogels SM de Jong | 2001 | J Anxiety Disord2001，15，5： | 1 |
| 6 | The impact of per-ceived complexity, deviation and comprehension on the appreciation ofvisual metaphor in advertising across three European countries 显示文摘 | Van Mulken Margot Rob le Pair Forceville C | 2010 | Journal of Pragmatics2010，，42： | 1 |
| 7 | Calculation of thermodynamic properties of finite Bose-Einstein systems显示文摘 | Borrmann P Harting J Mulken O | 1999 | Physical Review A1999，60，2： | 1 |
| 8 | Politeness markers in French and dutch requests显示文摘 | MULKEN M V | 1996 | Language Sciences1996，，18： | 1 |
| 9 | Use of an automatic exposure control mechanism for dose optimization in multi - detec- tor row CT examination: clinical evaluation显示文摘 | Mulkens TH Bellinck P Baeyaert M | 2005 | Radiology2005，237，1： | 1 |
| 10 | Do not eat the red food!: prohibition of snacks leads to their relatively higher consumption in children显示文摘 | Jansen E Mulkens S Jansen A | 2007 | Appetite2007，49，3： | 1 |
| 11 | Urinary stone dis-ease:comparison of standard-dose and low-dose with 4D MDCTtube current modulation显示文摘 | Mulkens TH Daineffe S De Wijnqaert R | 2007 | AJR2007，188，2： | 1 |
| 12 | Evaluation of the trea tmen to fclub feet with the Dimeglioscore 显示文摘 | Van Mulken JM Bulstra SK Hoefnagels NH | 2001 | J Pediatr Orthop2001，21，5： | 1 |
| 13 | Use of allautomat- ic exposure control mechanism for dose optimization inmuhi- detector row CT examinations: clinical evaluation显示文摘 | Mulkens TH Bellinek P Baeyuere M | 2005 | Radiology2005，237，1： | 1 |
| 14 | Use of an automatic exposure control mechanism for dose optimi- zation in multi-detector row CT examinations:clinical e- valuation显示文摘 | Mulkens TH Bellinck P Baeyaert M | 2005 | Radiology2005，237，： | 1 |
| 15 | Uinary stone disease: comparison of tandarddose and low-dose with 4D MSCT tube cur- rent modulation 显示文摘 | Mulkens TH Daineffe S De wijngaert R | 2007 | AJR2007，188，3： | 1 |
| 16 | Bell's palsy and herpes simplex virus 显示文摘 | Schirm J Mulkens PS | 1997 | APMIS1997，105，： | 1 |
| 17 | Use of an auto-matic exposure control mechanism for dose optimization in multi-detector row CT examinations:clinical evaluation显示文摘 | Mulkens TH Bellinck P Baeyaert M | 2005 | Radiol-ogy2005，237，1： | 1 |
| 18 | Alginates-A new wound dressing in treatment of the donor site ofsp lit thickness skin grafts显示文摘 | Lagarde C Mulkens P J M W Imheuer R | | 0，，09： | 1 |
| 19 | The impact of perceived complexity, deviation and comprehension on the appreciation of visu- al metaphor in advertising across three European countries 显示文摘 | Mulken M | 2010 | Journal of Pragmatics2010，，42： | 1 |
| 20 | Use of an automatic exposure control mechanism for dose optimization in multi-detector row CT examinations:clinical evaluation显示文摘 | Mulkens TH Bellinck P Baeyaert M | 2005 | Radiology2005，237，1： | 1 |
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