|
|
|
题名
|
作者
|
年代
|
出处
|
被引量
|
| 1 | Non-destructive thickness characterisation of 3D multilayer semiconductor devices using optical spectral measurements and machine learning显示文摘Three-dimensional(3D)semiconductor devices can address the limitations of traditional two-dimensional(2D)devices by expanding the integration space in the vertical direction.A 3D NOT-AND(NAND)flash memory device is presently the most commercially successful 3D semiconductor device.It vertically stacks more than 100 semiconductor material layers to provide more storage capacity and better energy efficiency than 2D NAND flash memory devices.In the manufacturing of 3D NAND,accurate characterisation of layer-by-layer thickness is critical to prevent the production of defective devices due to non-uniformly deposited layers.To date,electron microscopes have been used in production facilities to characterise multilayer semiconductor devices by imaging cross-sections of samples.However,this approach is not suitable for total inspection because of the wafer-cutting procedure.Here,we propose a non-destructive method for thickness characterisation of multilayer semiconductor devices using optical spectral measurements and machine learning.For>200-layer oxide/nitride multilayer stacks,we show that each layer thickness can be non-destructively determined with an average of approximately 1.6Åroot-mean-square error.We also develop outlier detection models that can correctly classify normal and outlier devices.This is an important step towards the total inspection of ultra-high-density 3D NAND flash memory devices.It is expected to have a significant impact on the manufacturing of various multilayer and 3D devices. | Hyunsoo Kwak Sungyoon Ryu Suil Cho Junmo Kim Yusin Yang Jungwon Kim | 2021 | Light(Advanced Manufacturing)2021，2，1： | 4 |
| 2 | Multi-directionally wrinkle-able textile OLEDs for clothing-type displays显示文摘A clothing-type wearable display can be utilized in fashion,bio-healthcare,and safety industries as well as smart textiles for the internet of things(IoTs)and wearable devices.In response to this trend,we demonstrate a textile display that can endure the active movements of a human body.It can be applied to any kind of textile,and is durable against conditions such as rain,sweat,and washing.As a key technology for realizing the multi-directional wrinkle-able textile display,we fabricated a stress-lowering textile platform with an ultrathin planarization layer replicated from the flat surface of glass.An elastomeric strain buffer for reducing mechanical stress is also inserted into the textile platform.Here,organic light-emitting diodes(OLEDs)with red,green and blue color,thin film transistors(TFTs)fabricated at a low temperature below 150℃,and a washable encapsulation layer blocking both gas and liquid were demonstrated on the textile platform. | Seungyeop Choi Woosung Jo Yongmin Jeon Seonil Kwon Jeong Hyun Kwon Young Hyun Son Junmo Kim Jun Hong Park Hyuncheol Kim Ho Seung Lee Minwoo Nam Eun Gyo Jeong Jeong Bin Shin Taek-Soo Kim Kyung Cheol Choi | 2020 | npj Flexible Electronics2020，4，1： | 3 |
| 3 | A nonparametric statistical method for image segmentation using information theory and curve evolution 显示文摘 | Junmo Kim John W Fisher | 2005 | IEEE Transactions on Image Processing2005，14，10： | 1 |
| 4 | A nonparametric statistical method for image segmentation using information theory and curve evolution 显示文摘 | Junmo Kim John W Fisher Ⅲ | 2005 | IEEE Transactions on Image Processing2005，14，10： | 1 |
| 5 | Economic integration of major industrialized areas: An empirical tracking of the continued trend显示文摘 | Kim Junmo | | 0，，： | 1 |
| 6 | Economic integration of major industrialized areas:An empirical tracking of the continued trend 显示文摘 | Kim junmo | 2001 | Technological Forecasting & Social Change2001，67，23： | 1 |
| 7 | A non- parametric statistical method for image segmentation using information theory and curve evolution 显示文摘 | Kim Junmo Fisher W John Yezzi Anthony | 2005 | IEEE Trans on Image Processing2005，14，10： | 1 |
| 8 | A curve evolution-based variational approach to simultaneous image restoration and segmentation 显示文摘 | Junmo Kim Andy Tsai Mujdat Cetin | 2002 | IEEE International Conference on Image Processing(S1522-4880)2002，1，： | 1 |
| 9 | Wearable EEG electronics for a Brain–AI Closed-Loop System to enhance autonomous machine decision-making显示文摘Human nonverbal communication tools are very ambiguous and difficult to transfer to machines or artificial intelligence(AI).If the AI understands the mental state behind a user’s decision,it can learn more appropriate decisions even in unclear situations.We introduce the Brain-AI Closed-Loop System(BACLoS),a wireless interaction platform that enables human brain wave analysis and transfers results to AI to verify and enhance AI decision-making.We developed a wireless earbud-like electroencephalography(EEG)measurement device,combined with tattoo-like electrodes and connectors,which enables continuous recording of high-quality EEG signals,especially the error-related potential(ErrP).The sensor measures the ErrP signals,which reflects the human cognitive consequences of an unpredicted machine response.The AI corrects or reinforces decisions depending on the presence or absence of the ErrP signals,which is determined by deep learning classification of the received EEG data.We demonstrate the BACLoS for AIbased machines,including autonomous driving vehicles,maze solvers,and assistant interfaces. | Joo Hwan Shin Junmo Kwon Jong Uk Kim Hyewon Ryu Jehyung Ok SJoon Kwon Hyunjin Park Tae-il Kim | 2022 | npj Flexible Electronics2022，6，1： | 0 |
您所在的机构暂未开通此部分的功能，请联系管理员