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17篇 您的检索式:作者名="Bugiel E"
    题名 作者 年代 出处 被引量
1Growth of an inverse tetragonal distorted SiGe layer on Si (001) by adding small amounts of carbon 显示文摘Osten H J Bugiel E Zaumseil P 1994Appl Phys Lett1994,64,25:1
2Raman investigations of elastic strain relief in Si1-xGex layers on patterned silicon substrate显示文摘Dietrich B Bugiel E Osten H 1993J Appl Phys1993,,74:1
3Crystalline ternary rare earth oxide with capacitanee equivalent thickness below lnm for high-k application显示文摘Laha A Bugiel E 2006Appl Phys Lett2006,88,17:1
4Epitaxial multi-component rare earth oxide for high-k application显示文摘Laha A Fissel A Bugiel E 2007Thin Solid Films2007,515,:1
5High-k gate dielectrics with ultra-low leakage current based on praseodymium oxide 显示文摘Osten H J Liu J P Gaworzewski P Bugiel E Zaumseil P 2000IEDM Tech Digest2000,,:1
6Epitaxial multicomponent rare earth oxide for high-k application显示文摘Laha A Fissel A Bugiel E Osten H J 2005Thin Solid Films2005,515,:1
7Epitaxial growth of praseodymium oxide on silicon 显示文摘Osten H J Liu J P Bugiel E Mussig H J Zaumseil P 2001Mater Sci Eng B2001,87,:1
8Epitaxial praseodymium oxide: a new high-K dielectric显示文摘Osten H J Bugiel E Fissel A 2003Solid-State Electronics2003,47,:1
9Epitaxial growth of Pr2O3 on Si (111 ) and the observation of a hexagonal to cubic phase transition during post growth N2 annealing显示文摘Liu J P Zaumseil P Bugiel E Osten H J 2001Appl Phys Lett2001,79,:1
10Epitaxial multicomponent rare earth oxide for high-k application显示文摘Laha A Fissel A Bugiel E Osten H J 2007Thin Solid Films2007,515,:1
11Growth of an inverse tetragonal distorted SiGe layer on Si (001) by adding small amounts of carbon 显示文摘Osten H J Bugiel E Zaumseil P 1994Appl Phys Lett1994,64,25:1
12Epitaxial praseodymium oxide: a new high-k dielectric显示文摘Osten E J Bugiel E Fissel A 2003Sol Sta Elec2003,47,12:1
13Strain-stabilized highly concentrated pseudomorphic Si1-xCx layers in Si显示文摘Rucker H Methfessel M Bugiel E 1994Phys Rev Lett1994,72,:1
14Influence of N2/H2 plasma treatment on chemical vapor deposited TiN multilayer structures for advanced CMOS technologies显示文摘Melnik V Wolanski D Bugiel E 2003Mater Sci Eng2003,102,:1
15Growth of aninverse tetragonaI distorted SiGe Iayer on Si(001)byadding small amounts of carbon显示文摘OSTEN H J BUGIEL E ZANMSEIL P 1994Appl Phys Lett1994,64,25:1
16Measurement of stress and relaxation in Si1-x Gex layers by Raman line shift and x-ray diffraction显示文摘Dietrich B Bugiel E Klatt J 1993J Appl Phys1993,74,5:1
17Measurement of stress and relaxation in Si1-xGex layers by Raman line shift and X-ray diffraction 显示文摘DIETRICH B BUGIEL E KLATT J 1993J Appl Phys1993,74,5:1
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