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11篇 您的检索式:期刊名="Microsystemtechnologies"
    题名 作者 年代 出处 被引量
1Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrations显示文摘Yang Bin Lee C 2010MicrosystemTechnologies2010,16,6:1
2Auto-Calibration of CapacitiveMEMS Accelerometers Based on Pull-in Voltage 显示文摘Rocha L A Dias R A Cretu E 2011MicrosystemTechnologies’2011,17,3:1
3Factorial experimental design applied to DRIE foroptimised process in power electronics applicationsrequiring high aspect ratio trenches 显示文摘BRUNET M DUBREUIL P MAHFOZ-KOTB H 2009MicrosystemTechnology2009,15,:1
4New plastification concepts for micro injection moulding 显示文摘Michaeli W Spennermann A Gartner R 2002MicrosystemTechnologies2002,8,1:1
5The effect of injectionmolding PMMA microfluidic chips thickness uniformityon the thermal bonding ratio of chips显示文摘DUL CHANG H SONG M 2012MicrosystemTechnologies2012,18,6:1
6Design principles and consid-erations for the ‘ ideal,silicon piezoresistive pres-sure sensor: a focused review 显示文摘Kumar S S Pant B D 2014Microsystemtechnologies2014,20,7:1
7Control ofthe Quality of Laser Surface Texturing 显示文摘CHRISTOPHE V GUY M THIERRY B 2008MicrosystemTechnologies2008,14,911:1
8Fabrication of electrostatic MEMS microactuatorbased on X-ray lithography with Pb-based X-ray maskand dry -film -transfer-to -PCB process 显示文摘KERDLAPEE P WISITSORAAT A PHOKARATKUL D 2014MicrosystemTechnologies2014,20,1:1
9Micro wire EDM for high aspect ratio 3D microstructuring of ceramic and metals显示文摘 Forster R Menz W 2005MicrosystemTechnologies2005,10,:1
10The micromilling process for high aspect ratio microstructures显示文摘FRIEDRICH C R VASILE M J 1996MicrosystemTechnologies1996,2,3:1
11Design andmanufacturing of micro milling tools显示文摘Fleischer J Deuchert M Ruhs C 2008MicrosystemTechnologies2008,14,911:1
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