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26篇 您的检索式：期刊名="Microelectro mechanical systems"

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	题名	作者	年代	出处	被引量
1	MEMS acceleration sen sor with large dynamic range and high sensitivity显示文摘	Backoum E G Cheng M H	2012	Journal of Microelectro Mechanical Systems2012，21，5：	1
2	Precision Poly - ( dimethyl Siloxane) Masking Technology for High - resolution powder blasting 显示文摘	Pawlowski A G Sayah A Gijs M A M	2005	Microelectro mechanical systems2005，14，3：	1
3	A computer-aided design system for microelectromechanical systems显示文摘	SENTURIA S HARRIS R JOHNSON B	1992	Journal of Microelectro Mechanical Systems1992，1，1：	1
4	Limit Cycle Oscillations in CW Laser-Driven NEMS显示文摘	Keith Aubin	2005	Jouranl of Microelectro Mechanical Systems2005，14，6：	1
5	Development and Characterization of Micromachined Hollow Cathode Plasma Display Devices 显示文摘	PARK S J FAN Z F	2002	J of Microelectro mechanical Systems2002，11，5：	1
6	High- speed micro fabricated silicon turbo machinery and fluid film bearings显示文摘	Frechette L G Jacobson S A Breuer K S	2005	Journal of Microelectro Mechanical Systems2005，14，：	1
7	The reliability of microelectromechanical systems (MEMS) in shock environments显示文摘	Srikar V T Sent S D	2002	Journal of Microelectro Mechanical Systems2002，11，3：	1
8	Creating,transporting,cutting,and merging liquid droplets by electrowettingbased actuation for digital microfluidic circuits显示文摘	Cho S K Moon H J Kim C J	2003	Journal of Microelectro Mechanical Systems2003，12，1：	1
9	Wireless micromachined ceramic pressure sensor for high- temperature applications 显示文摘	FONSECA M A ENGLISH J M ARX M	2002	Journal of Microelectro Mechanical Systems2002，8，4：	1
10	A vacuum packaged surface micromachined resonant accelerometer显示文摘	SESHIA A PALANIAPAN M ROESSIG T	2002	Journal of Microelectro Mechanical Systems2002，11，6：	1
11	Simple Fabrication Process for Self-Aligned High-Performance Microscanners- Demonstrated Use to Generate a 2-D Ablation Pattem显示文摘	Hyuck Choo Garmire D Demmel J	2007	Microelectro mechanical Systems2007，16，2：	1
12	Vacuum packaging technology using localized aluminum silicon to glass bonding显示文摘	Yu T Cheng Wan Tai Hsu	2002	Journal of Microelectro -mechanical Systems2002，11，：	1
13	A wireless microsystem for the remote sensing of pressure,temperature,and relative humidity显示文摘	DEHENNIS A D WISE K D	2005	Journal of Microelectro Mechanical Systems IEEE2005，14，1：	1
14	Simple Fabrication Process for Self-Aligned High-Performance MicroscannersDemonstrated Use to Generate a 2-D Ablation Pattern显示文摘	Hyuck C Garmire D Demmel J	2007	Microelectro mechanical Systems2007，16，2：	1
15	A planar electroosmotic micropump 显示文摘	C H Chen J G Santiago	2001	Journal of Microelectro - mechanical Systems2001，11，：	1
16	High-Performance Inductors Using Capillary Based Fluidic Self-Assembly显示文摘	Scott K L Hirano T Yang H Singh H Howe R T Niknejad A M	2004	Journal of Microelectro Mechanical Systems2004，13，2：	1
17	Spiked biopotential electrodes显示文摘	GRISS P ENOKSSON P TOLVANEN-LAAKSO H K	2000	The 13th Annual International Conference on Microelectro Mechanical Systems2000，，1：	1
18	Miniaturiza- tion and integration of photoacoustic detection with a microfab- ricated chemical reactor system 显示文摘	Samra Friebaugh Klavs Jensen Martin Schmidt	2001	Journal of Microelectro Mechanical Systems2001，10，2：	1
19	Real-time etch-depth measurements of MEMS devices显示文摘	CHARPENAY S B XU J H HAIGIS J	2002	Microelectro Mechanical Systems2002，11，2：	1
20	Simple fabrica- tion process for self-aligned high-performance microscan- hers-demonstrated use to generate a 2-D ablation pattern 显示文摘	Hyuck Choo Garmire D Demmel J etal	2007	Microelectro Mechanical Systems2007，16，2：	1

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