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1Optical meta-waveguides for integrated photonics and beyond显示文摘The growing maturity of nanofabrication has ushered massive sophisticated optical structures available on a photonic chip.The integration of subwavelength-structured metasurfaces and metamaterials on the canonical building block of optical waveguides is gradually reshaping the landscape of photonic integrated circuits,giving rise to numerous metawaveguides with unprecedented strength in controlling guided electromagnetic waves.Here,we review recent advances in meta-structured waveguides that synergize various functional subwavelength photonic architectures with diverse waveguide platforms,such as dielectric or plasmonic waveguides and optical fibers.Foundational results and representative applications are comprehensively summarized.Brief physical models with explicit design tutorials,either physical intuition-based design methods or computer algorithms-based inverse designs,are cataloged as well.We highlight how meta-optics can infuse new degrees of freedom to waveguide-based devices and systems,by enhancing light-matter interaction strength to drastically boost device performance,or offering a versatile designer media for manipulating light in nanoscale to enable novel functionalities.We further discuss current challenges and outline emerging opportunities of this vibrant field for various applications in photonic integrated circuits,biomedical sensing,artificial intelligence and beyond.Yuan Meng Yizhen Chen Longhui Lu Yimin Ding Andrea Cusano Jonathan A.Fan Qiaomu Hu Kaiyuan Wang Zhenwei Xie Zhoutian Liu Yuanmu Yang Qiang Liu Mali Gong Qirong Xiao Shulin Sun Minming Zhang Xiaocong Yuan Xingjie Ni 2021Light(Science & Applications)2021,10,12:6
2紧凑型宽带低损耗3 dB功率分配器设计与制备显示文摘光功率分配器作为光子集成电路中分束并束的关键器件,要求结构紧凑、宽带、低损耗。基于亚波长光栅(SWG)结构,提出一种分束区域长5μm、分光比为50∶50的超大带宽低损耗3 dB光功率分配器。仿真结果表明,该光功率分配器在±15 nm的大工艺容差下,TE模式在1.26~2.02μm波段内(即760 nm带宽)损耗低于0.54 dB。通过电子束曝光、干法刻蚀等工艺在绝缘体上硅(SOI)晶圆上加工制备该光功率分配器,在扫描电子显微镜(SEM)下观察SWG结构的加工误差不超过±10 nm。此外,搭建垂直耦合测试平台,利用可调谐激光器在1496.8~1600 nm波段,对TE模式的损耗与分光比进行测试。结果表明,该波段损耗约为0.3 dB,与仿真结果吻合,分光比误差在5%以内。该功率分配器适用于高速、大容量通信、波分复用(WDM)系统等互联应用场合。周彦汝 尹程玉 刘文耀 邢恩博 唐军 刘俊 2023光学学报2023,43,22:0
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