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    题名 作者 年代 出处 被引量
1SYNTHESIS AND THERMAL STABILITY OF NANOCOMPOSITE nc-TiN/a-TiB_2 THIN FILMS显示文摘Several nc-TiN/a-TiB2 thin films comprised of nanocrystalline (nc-) TiN and amor phous (a-) TiB2 phases were deposited on Si(100) at room temperature by reactive unbalanced dc magnetron sputtering, followed by vacuum annealed at 400, 600, 80 0 and 1000℃ for 1h, respectively. Effects of B content on microstructure, mecha nical behaviors and thermal microstructure stability have been investigated by X -ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and nanoindentation measurements. The results indicated that B addition greatly affected both microstructure and mechanical behavior of nc-Ti N/a-TiB2 thin films. With increasing B content the grain size decreased. A maxim um hardness value of about 33GPa was obtained at B content of about 19at.%. The improved mechanical properties of nc-TiN/a-TiB2 films with the addition of B int o TiN were attributed to their densified microstructure with development of fine grain size. Only addition of sufficient B could restrain grain growth during an nealing. High B content resulted in high microstructure stability. The crystalli zation of amorphous matrix occurred at about 800℃, forming TiB or TiB2 crystall ite, depending on B content. Before that no change in bonding configuration was found.Y.H.Lu Z.F.Zhou P.Sit Y.G.Shen K.Y.Li H.Chen 2005Acta Metallurgica Sinica(English Letters)2005,18,3:1
2CORRELATION BETWEEN THE ELASTIC AND THE VIBRONIC BEHAVIOR OF NANOSTRUCTURED TITANIA AND THEIR PRESSURE,SIZE,AND TEMPERATURE DEPENDENCE显示文摘Correlation bet ween the elastic and the vibronic behavior of TiO_(2) and their responses to thevariation of crystal size,applied pressure,and measuring temperature has been investig ated basedon the bond order-length-strength correlation mechanism.Theoretical reproduction of themeasurements clarified that.(i)the elastic modulus(B)and the Raman shifts(△ω)are stronglycorrelated and we can know either one of the B or the △ω from the other;(i)the under-coordination induced cohesive energy loss and the energy density gain in the surface up to skindepth determines the size effect;(ii)bond expansion and bond weakening due to thermalvibration originat es the thermally softened elastic modulus and the Raman shifts;and(iv)bondcompression and bond strengthening results in the mechanically stiffened elastic modulus and theRaman shifts.With the developed premise,one can predict the changing trends of the concernedproperties with derivatives of quantitative information of the atomic cohesive energy,bindingenergy density,Debye tempera ture,and nonlinear compressibility of the specimen.X.J.LIU L.K.PAN Z.SUN Y.M.CHEN X.X.YANG L.W.YANG Z.F.ZHOU CHANG Q.SUN 2011Journal of Advanced Dielectrics2011,1,4:0
3SYNTHESIS AND MICROSTRUCTURE OF SUPERHARD TiN/SiN_x MULTILAYER THIN FILMS显示文摘Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substrates (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar-N2 gas mixture. The rotation speed of the substrate holder was varied from 1 to 20rpm, while target currents were held constant, to produce bilayer periods varying from approximately 22 to 0.6nm. These multilayer films were characterized by atomic force microscopy (AFM), cross-sectional transmission electron microscopy (TEM), scanning electron microscopy (SEM), and microhardness measurements. TEM and SEM studies showed elimination of columnar structure in TiN, owing to the incorporation of amorphous SiNx layers. The crystallinity of TiN and amorphous nature of SiNx were confirmed by high resolution TEM. An optimum rotation speed was observed, at which hardness was a maximum. The resulting bilayer period was found to be approximately 1.6nm,which resulted in a significant improvement in microhardness (~5TGPa). The rms surface roughness for this film was less than 1.5nm.Z.F.Zhou Y.G.Shen Y.W.Mai K.Y.Li 2005Acta Metallurgica Sinica(English Letters)2005,18,3:0
4COMPOSITION EFFECT ON DRY SLIDING WEAR BEHAVIORS OF Ti-B-N THIN FILMS显示文摘Friction and sliding wear behaviour of Ti-B-N coatings against AISI440C steel ball and WC-6wt%Co ball were studied by using pin-on-disk tribometer along with microstructure characterization using optical microscopy (OM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). It is shown that the wear resistance of film depended on the wear mechanism. In the case of AISI440C steel, adhesive wear were pre-dominant and the wear rate increased sharply to a maximum when N content reach ~38at. %. This might be related to the change of film microstructure and phase configuration, so the least adhesive transfer of tribo-film was observed. If WC-6wt% Co ball was used, less deformation wear debris was observed, this was responsible for the rise of wear rate. Despite of different wear modes, friction coefficients in both cases were found to depend mainly on the formation and the amount of h-BN phase. Elemental analysis by energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) revealed that oxygen participated in the wear behavior by reacting with films to form the debris comprised of various types of Ti oxide including TiO, TiO2 and Ti2O3 ,which increased wear resistance.P.Sit Y.H.Lu H.Chen Z.F.Zhou Y.G.Shen K.Y.Li 2005Acta Metallurgica Sinica(English Letters)2005,18,3:0
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