| 2 | THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD显示文摘This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates. | L.P.Shi X.D.He Y.Li | 2004 | Acta Metallurgica Sinica(English Letters)2004，17，3： | 0 |
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