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| 1 | Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system显示文摘This letter presents a polarimetric interferometer(PI) that can measure the ellipsometric parameter θ with an accuracy of 0.01 leading to a potential accuracy of 17 pm.The PI is constructed and compared with a commercial heterodyne interferometer(HI).Given its low nonlinearity,the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system.A rotating half-wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter. | 许素安 Luc Chassagne Suat Topcu 陈乐 孙坚 严天宏 | 2013 | Chinese Optics Letters2013，11，6： | 6 |
| 2 | 基于相控外差干涉技术的纳米定位方法的研究显示文摘针对工业领域和计量界对定位精度要求的提高,提出了一种基于迈克尔逊干涉仪反向特性的定位控制方法。该方法采用相位锁定控制和外差干涉技术来完成位置测量和控制。在严格控制实验环境条件下,得到了步距值为5 nm的双向步进位移。步距值的不确定度为8×10-9 nm,位移重复性误差小于1 nm。该定位方法的测量尺寸可直接溯源至长度标准,并且采用光电步进相移法可克服压电陶瓷的非线性和蠕变的机械缺陷。该方法在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和超精密加工等领域。 | 许素安 李东升 Chassagne Luc Topcu Suat | 2011 | 仪器仪表学报2011，32，7： | 6 |
| 3 | Phase control of ellipsometric interferometer for nanometric positioning system显示文摘Development in industry is asking for improved resolution and higher accuracy in dimensional metrology. In this paper,we proposed a control displacement method based on a polarization ellipsometirc interferometer and phase-locked loop technique. The proposed principle was set up. The experimental results of step and step displacements with a step value of 5 nm were presented. We also analyzed the resolution,the potential minimal displacement of the established system. The results show that the position error induced by the ellipticty deviation of the light beam becomes negligible thanks to our signal processing circuit with high-order filter. This method could be useful for many applications in nano dimensional metrology and semiconductor industry. | XU SuAn CHASSAGNE Luc TOPCU Suat ZHONG ShaoJun HUANG YanYan | 2011 | Science China(Technological Sciences)2011，54，12： | 4 |
| 4 | 基于偏振激光干涉技术的波长计显示文摘提出了一种基于偏振激光干涉技术的波长计,该波长计能在微米行程上实现10^-6的测量精度,位移行程的缩减有效地减小了环境温度、波长漂移、空气折射率对测量精度的影响。给出了两种未知激光源(DL100-Toptica和Nd:YAG)的波长测量值及不确定度值,同时还给出了该波长计与商用波长计的比对结果。 | 许素安 钟绍俊 孙坚 陈乐 Chassagne Luc Topcu Suat | 2013 | 计量学报2013，34，3： | 3 |
| 5 | 偏振激光干涉仪的纳米定位系统显示文摘详细阐述了用于纳米定位的偏振激光干涉仪的原理,并介绍了基于该偏振仪的纳米定位控制方法.该方法已由实验论证,实验位移系统的最小步长实测值为5 nm.并对系统的最小位移步长、重复性和分辨率做了详细的分析,在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和纳米加工. | 许素安 Luc Chassagne Suat Topcu Yasser Alayli 李东升 | 2009 | 中国计量学院学报2009，20，2： | 1 |
| 6 | Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques 显示文摘 | Suat Topcu Luc Chassagne Yasser Alayli | 2005 | Opt Commun2005，247，： | 1 |
| 7 | Improving the accuracy of homodyne Michelson intrferometers using polarization state measurement techniques显示文摘 | Suat Topcu Luc Chassagne Yaser Alayli | 2005 | Opt Commun2005，247，： | 1 |
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