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1篇 您的检索式：作者名="Sandy Peterhansel"

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		题名	作者	年代	出处	被引量
	1	Solving the inverse grating problem by white light interference Fourier scatterometry显示文摘Scatterometry is a well-established,fast and precise optical metrology method used for the characterization of sub-lambda periodic features.The Fourier scatterometry method,by analyzing the Fourier plane,makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning.To improve the depth sensitivity of this method,we combine it with white light interferometry.We show the exemplary application of the method on a silicon line grating.To characterize the sub-lambda features of the grating structures,we apply a model-based reconstruction approach by comparing simulated and measured spectra.All simulations are based on the rigorous coupled-wave analysis method.	Valeriano Ferreras Paz Sandy Peterhansel Karsten Frenner Wolfgang Osten	2012	Light(Science & Applications)2012，1，1：	8

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