| 1 | STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD显示文摘DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V. | L.Chen Z.Y.Liu D.C.Zeng W.Q.Qiu Z.H.Yuan S.S.Lin H.J.Hou | 2003 | Acta Metallurgica Sinica(English Letters)2003，16，4： | 0 |
您所在的机构暂未开通此部分的功能，请联系管理员