维普期刊资源整合服务平台（V6.5）

维普中文期刊产品整合服务

2篇 您的检索式：作者名="S.M.DANIELS"

选中清除导出查看参考文献查看引证文献引用追踪共1页首页上一页第1页下一页末页 /1 跳转

		题名	作者	年代	出处	被引量
	1	Electron Density and Optical Emission Measurements of SF_6/O_2 Plasmas for Silicon Etch Processes显示文摘This work investigates internal plasma process parameters using a hairpin resonance probe and optical emission spectroscopy. The dependence of electron density and atomic fluorine on the percentage of oxygen in an SF6 /O2 discharge was measured using these methods. An RIE Oxford Instruments 80 plus chamber was used for the experiments. Two different process powers (100 W and 300 W) at a constant pressure (100 mTorr) were used, and it was found that the optical emission intensity of the 703.7 nm and 685.6 nm lines of atomic fluorine increased rapidly as oxygen was added to the SF6 discharge, reached their maximum at an O2 fraction of 20% and then decreased with further addition of oxygen. The plasma electron density was also strongly influenced by the addition of O2 .	M.M.MORSHED S.M.DANIELS	2012	Plasma Science and Technology2012，14，4：	1
	2	Plasma Treatment of Natural Jute Fibre by RIE 80 plus Plasma Tool显示文摘Plasma treatment can be used to modify the structure of natural fibre like jute fora variety of applications. Environmentally friendly jute fibre was treated with argon and oxygenplasma. The treated samples were characterized by X-ray diffraction (XRD), Fourier transforminfrared spectroscopy (FTIR) and optical microscope. The macromolecular and microstructuralchanges in cellulose confirmed the change by plasma treatment. The XRD results confirmed thatthe crystal size and the crystallinity of the plasma treated fibre increased. Argon plasma treatedfibre had a smooth and compact surface, compared to oxygen plasma treated fibre. The maximumstain (i.e. stress) concentrated in the oxygen plasma treated fibre. Optical micrographs showedthe oxygen plasma treated fibre tended to rupture due to higher strain (i.e., stress) comparedto fibre with argon plasma treatment. FTIR results also provided the evidence of change in thechemical constituents with plasma treatment.	M.M.MORSHED M.M.ALAM S.M.DANIELS	2010	Plasma Science and Technology2010，12，3：	1

返回顶部每页显示：

共1页首页上一页第1页下一页末页 /1 跳转

goolge学术搜索-维普

网站首页 | 关于我们 | 联系我们 | 产品服务 | 客服中心 | 广告服务 | 版权声明 | 网站联盟 | 友情链接 | 售卡网点

版权所有© 渝B2-20050021-1　渝公网安备 50019002500403号　违法和不良信息举报中心

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费