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1篇 您的检索式：作者名="Rodolphe Boudot"

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		题名	作者	年代	出处	被引量
	1	Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices显示文摘Atomic devices such as atomic clocks and optically-pumped magnetometers rely on the interrogation of atoms contained in a cell whose inner content has to meet high standards of purity and accuracy.Glass-blowing techniques and craftsmanship have evolved over many decades to achieve such standards in macroscopic vapor cells.With the emergence of chip-scale atomic devices,the need for miniaturization and mass fabrication has led to the adoption of microfabrication techniques to make millimeter-scale vapor cells.However,many shortcomings remain and no process has been able to match the quality and versatility of glass-blown cells.Here,we introduce a novel approach to structure,fill and seal microfabricated vapor cells inspired from the century-old approach of glass-blowing,through opening and closing single-use zero-leak microfabricated valves.These valves are actuated exclusively by laser,and operate in the same way as the“make-seals”and“break-seals”found in the filling apparatus of traditional cells.Such structures are employed to fill cesium vapor cells at the wafer-level.The make-seal structure consists of a glass membrane that can be locally heated and deflected to seal a microchannel.The break-seal is obtained by breaching a silicon wall between cavities.This new approach allows adapting processes previously restricted to glass-blown cells.It can also be extended to vacuum microelectronics and vacuum-packaging of micro-electro-mechanical systems(MEMS)devices.	Vincent Maurice Clément Carlé Shervin Keshavarzi Ravinder Chutani Samuel Queste Ludovic Gauthier-Manuel Jean-Marc Cote Rémy Vicarini Moustafa Abdel Hafiz Rodolphe Boudot Nicolas Passilly	2022	Microsystems & Nanoengineering2022，8，6：	0

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