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77篇 您的检索式:作者名="Muralt"
    题名 作者 年代 出处 被引量
1Fabrication and characterization of micromachined accelerometers based on PZT thin films 显示文摘Baborowski J Hediger S Muralt P 1994Ferroelectrics1994,224,:1
2Design of a novel thin film piezoelectric accelerometer 显示文摘Nemirovsky Y Nemirovsky A Muralt Z P 1996Sensors and Actuators A: Physical1996,56,:1
3Shear mode coupling and properties dispersion in 8 GHz range AINthin film bulk acoustic wave (BAW) resonator显示文摘MARTIN F JAN M E MURALT P 2006Thin Solid Films2006,514,12:1
4Microstructural evolution of dense and porous pyroelectric Pb1-xCaxTiO3 thin films 显示文摘 SAGALOWICZ L MURALT P 1999J Mater Res1999,14,10:1
5PZT thin films for microsensors and actuators:Where do we stand 显示文摘Muralt P 2000IEEE Transactions on Ultrasonics Ferroelec- trics& Frequency Control2000,47,4:1
6Micromachined infrared detectors based on pyroelectric thin films 显示文摘 2001Rep Prog Phys2001,64,:1
7Orientation and composition dependence of piezoelectric - dielectric proper- ties of sputtered Pb(Zrx ,Ti1-x)O3 thin films 显示文摘S Hiboux P M N S Muralt P Setter A N 1999Mrs Pro- ceedings1999,59,6:1
8Bulk acoustic wave resonator operating at 8 GHz for gravi- metric sensing of organic films显示文摘Rey-Mermet S Lanz R Muralt P 2005Sensors and Actuators B2005,114,2:1
9Ferroelectric gate for control of transport properties of two-dimensional electron gas at A1GaN/GaN heterostructures 显示文摘STOLICHNOV I MALIN L MURALT P 2006Applied Physics Letters2006,88,04:1
10All fiber laser scribing ofCu(In,Ga)Se2 thin-film solar modules显示文摘BURN A MURALT M PILZ S 2013Physics Procedia2013,41,:1
11PZT thin films for microsensors and actuators:where do we stand显示文摘Muralt P 2000IEEE Transactions on Ultrasonic Ferroelectrics and Frequency Control2000,47,4:1
12Design of a Novel Thin Film Piezoelectric Accelerometer显示文摘Nemirovsky Y Nemirovsky Z A Muralt P 1996Sensors and Actuators A : Physical1996,,56:1
13Walking activity measured by accelerometry during respiratory rehabilitation显示文摘Coronado M Janssens JP de Muralt B 2003J Cardiopulm Rehabil2003,23,5:1
14Thin film piezoelectrics for MEMS显示文摘Trolier-McKinstry S Muralt P 0,,12:1
15显示文摘Adachi Y Su D Muralt P 2005Appl Phys Lett2005,86,17:1
16Characterization of PZT Thin Films for Mi-crmotors显示文摘 1995M icroelectronic Engineering Proceedings of the 1995 1st European Meeting on Integ rated Ferroelectrics1995,29,14:1
17Micromachined Infrared Detectors Based on Pyroelectric Thin Films显示文摘MURALT P 2001Rep Prog Phys2001,64,:1
18显示文摘Maeder T Muralt P Sagalowicz L 1999Thin Solid Films1999,345,:1
19Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering显示文摘Dubois M A Muralt P 2001Journal of Applied Physics2001,89,:1
20High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators显示文摘Alvaro Artieda Paul Muralt 2008IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control2008,55,11:1
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