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163篇 您的检索式：作者名="Malshe"

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	题名	作者	年代	出处	被引量
1	Localized CO_2 laser bonding process for MEMS packaging显示文摘The packaging poses a critical challenge for commercialization of MEMS products. Major problems with the packaging process include degraded reliability caused by the excess stress due to thermal mismatch and altered performance of the MEMS device after packaging caused by thermal exposure. The localized laser bonding technique for ceramic MEMS packaging to address above-mentioned challenges was investigated. A continuous wave CO2 laser was used to locally heat sealing material for ceramic MEMS package lid to substrate bonding. To determine the laser power density and scanning speed, finite element analysis thermal models were constructed to simulate the localized laser bonding process. Further, the effect of external pressure at sealing ring on the bonding formation was studied. Pull testing results show that the scanning speed and external pressure have significant influence on the pull strength at the bonding interface. Cross-sectional microscopy of the bonding interface indicates that the packages bonded with relatively low scanning speed and external pressure conditions have higher bonding quality. This research demonstrates the potential of localized laser bonding process for ceramic MEMS packaging.	SUN Li A. P. MALSHE S. CUNNINGHAM A. MORRIS	2006	中国有色金属学会会刊:英文版2006，16，B02：	4
2	Challenges in the Packaging of MEMS显示文摘	Malshe A P O'Neal C Singh S B		0，，03：	1
3	Tip-based nanomanufacturing by electrical,chemical,mechanical and thermal processes显示文摘	MALSHE A P RAJUKAR K P VIRWANI K R	2010	Cirp Annals Manufacturing Technology2010，59，2：	1
4	A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates 显示文摘	Malshe A P Park B S Brown W D	1999	Diamond and Related Materials1999，8，7：	1
5	Review of electrochemical and electrodischarge machining 显示文摘	Rajurkar K P Sundaram M M Malshe A P	2013	Pro- cedia CIRP2013，，6：	1
6	Sequential multiplelaser-assisted polishing of free-standing CVD diamond substrates 显示文摘	Ozkan A M Malshe A P Brown W D	1997	Diamond and Related Materials1997，6，12：	1
7	Fluorinated acrylic copolymers, Part I: Study of clear coatings 显示文摘	Malshe V C Sangaj Nivedita S	2005	Progress in Organic Coatings2005，53，3：	1
8	Micro and nano machining by electro-physical and chemical processes显示文摘	Rajurkar K P Levy G Malshe A	2006	Annuals of the CIRP2006，55，2：	1
9	How is marketers'credibility construed within the sales - marketing interface 显示文摘	Malshe A	2010	Journal of Business Research2010，63，1：	1
10	Study of tribo-chemical lubricant film formation during application of nanolubricants in minimum quantity lubrication (MQL) grinding显示文摘	Kalita P Malshe AP Rajurkar KP	2012	CIRP Annals - Manufacturing Tech- nology2012，61，1：	1
11	Nano and microscle surface and sub-surface modifications induced in optical materials by femtosecond laser machining显示文摘	Malshe A Deshpande D		0，，1：	1
12	Fluorinated acrylic copolymers: Part I: Study of clear coatings 显示文摘	Malshe V C Nivedita S	2005	Progress in Organic Coatings2005，53，3：	1
13	Dry machining of aluminum-silicon alloy using polished CVD diamond-coated cutting tools inserts 显示文摘	Arumugam P U Malshe A P Batzer S A	2006	Surface & Coatings Technology2006，，200：	1
14	Femtosecond Laser-induced Periodic Stmcmm Writing on Diamond Crystals and Microclusters显示文摘	Ozkan A M Malshe A Railkar T A	1999	Applied Physics Letters1999，75，23：	1
15	Physical powder deposition of solid lubricant nanoparticles by electrostatic spray coating (esc) 显示文摘	Jiang W P Malshe A P Brown W D	2004	Surface & Coatings Technology2004，177，：	1
16	Recent Variations of Sea Ice and Air Temperatures in High Latitudes显示文摘	Chapman W L Malsh J E	1993	Bull Am Meteorology Society1993，，74：	1
17	Polyaniline/Single-walled Carbon Nanotube Composite Electronic Devices显示文摘	Ramamurthy P C Malshe A M Harrell W R	2004	Solid-state Electronics2004，48，：	1
18	Pulsed laser deposition diamond-like hydrogenated amporphous carbon films显示文摘	MALSHE A P KANETKAR S M OGALE S B	1990	Applied Physics1990，68，11：	1
19	Fluorinated Acrylic Eopolymers Part Ⅰ:Study of Clear Coatings 显示文摘	Malshe V C Snngaj N S	2005	Progress in Organic Coatings2005，91，3：	1
20	The effects of substrate properties on metal coatings from liquid medium by reactive laser deposition显示文摘	Park B S Malshe A P Mnyshondt A	1999	Surface and Coatings Technology1999，115，：	1

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