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1篇 您的检索式：作者名="Joseph W.Fowler"

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		题名	作者	年代	出处	被引量
	1	A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions显示文摘We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process.The reconstructions employ x-ray computed tomography,measured with a new and innovative high-magnification x-ray microscope.The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample.The x-ray generation target,a layer of platinum,is fabricated on the circuit wafer itself.A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit.The reconstruction is consistent with the circuit's design file.	Zachary H.Levine Bradley K.Alpert Amber L Dagel Joseph W.Fowler Edward S.Jimenez Nathan Nakamura Daniel S.Swetz Paul Szypyt Kyle R.Thompson Joel N.Ulom	2023	Microsystems & Nanoengineering2023，9，2：	0

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