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1Magnetic Properties and Coercivity of MnGa Films Deposited on Different Substrates显示文摘MnGa films were grown by magnetron sputtering on thermally oxidized Si(Si/SiO_2) and glass substrates. Films grown on single-crystal Si(100) substrate with different underlayers were prepared for comparison. It is found that the Si/SiO_2 substrate is more suitable for growing high-coercivity MnGa films than the glass substrate, which is the result of the isolated-island-like growth. A coercivity of 9.7 kOe can be achieved for the 10 nm MnGa films grown on Si/SiO_2 substrate at substrate temperature T_S of 450 °C.Optimized experimental conditions are specified by changing the thickness of the MnGa films and the temperature of the substrates.J.N.Feng W.Liu W.J.Gong X.G.Zhao D.Kim C.J.Choi Z.D.Zhang 2017Journal of Materials Science & Technology2017,33,3:1
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