| 1 | Application research on the sensitivity of porous silicon显示文摘Applications based on sensitive property of porous silicon(PSi) were researched. As a kind of porous material, the feasibility of PSi as a getter material was studied. Five groups of samples with different parameters were prepared. The gas-sensing property of PSi was studied by the test system and suitable parameters of PSi were also discussed. Meanwhile a novel structure of humidity sensor, using porous silicon as humidity-sensitive material, based on MEMS process has been successfully designed. The humidity-sensing properties were studied by a test system. Because of the polysilicon layer deposited upon the PSi layer, the humidity sensor can realize a quick dehumidification by itself. To extend service life and reduce the effect of the environment, a passivation layer(Si_3N_4/was also deposited on the surface of electrodes. The result indicated the novel humidity sensor presented high sensitivity(1.1 p F/RH%), low hysteresis, low temperature coefficient(0.5%RH/?C/and high stability. | Gaobin Xu Ye Xi Xing Chen Yuanming Ma | 2017 | Journal of Semiconductors2017，38，9： | 1 |
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