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11篇 您的检索式:作者名="FLAGELLO D"
    题名 作者 年代 出处 被引量
1Theory of high-NA imaging in homogeneous thin films显示文摘Flagello D G Milster T Rosenbluth A E 1996J Opt Soc Am A1996,13,:2
2Polarization effects associated with hyper-numerical-aperture lithography显示文摘D Flagello B Geh S Hansen 2005J Microlith Microfab Microsyst2005,4,03:1
3Optical Lithography into the Millennium: Sensitivity to Aberrations,Vibration and Polarization 显示文摘FLAGELLO D G MULKENS J WAGNER C 2000SPIE2000,4000,:1
4Understanding High Numerical Aperture Optical Lithography 显示文摘FLAGELLO D G ROSENBLUTH A E PROGLER C 1992Microelectronic Engineering1992,17,:1
5Polarization effects associated with hyper-numerical-aperture(》1)lithography显示文摘FLAGELLO D GEH B HANSEN S 2005J Microlith Microfab Microsyst2005,4,03:1
6Theory of high-NA imaging in homogeneous thin films显示文摘 Tom D Milster A E Rosenbluth 1996J Opt Soc Am A1996,13,1:1
7Polarization effects associated with hyper-numerical-aperture (> 1) lithography 显示文摘Flagello D Geh B 2005Journal of Microlithography Microfabrication and Microsystems2005,4,31:1
8Benefits and limitations of immersion lithography显示文摘 Flagello D G Streefkerk B 2004JM3-Journal of Microlithography Microfabrication and Microsystems2004,3,1:1
9Benefits and limitations of immersion lithography 显示文摘Mulkens J Flagello D 2004Journal of Microlithography Microfabrication and Microsystems2004,3,1:1
10Theory of high-NA imaging in homogeneous thin films显示文摘Flagello D G Milster T Rosenbluth A E 1996J Opt Soc Am A1996,13,:1
11Benefits and limitations of immersion lithography显示文摘MULKENS J FLAGELLO D STREEFKERK B 2004Journal of Microlithography Microfabrication and Microsystems2004,3,1:1
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