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20篇 您的检索式：期刊名="Microelectromech Systems"

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	题名	作者	年代	出处	被引量
1	A new technique for measuring the mechanical properties of thin films 显示文摘	Shape W N Bin Y Edwards R L	1997	Journal of Microelectromech System1997，，6：	1
2	A thermal-bubble-actuated micronozzle-diffuser pump显示文摘	Tsai J H Lin L	2002	J Microelectromech Systems2002，11，6：	1
3	Fracture strength of polysilicon at stress concentrations 显示文摘	Bagdahn J Sharpe W N Jadaan Jr O	2003	Microelectromech Systems2003，12，3：	1
4	Thin Film Shape Memory Alloy Microactuators显示文摘	Krulevitch P Lee A P Ramsey P B	1996	Microelectromech System1996，4，5：	1
5	A MEMS thermal biosensor for metabolic monitoring applications显示文摘	Wang L Sipe D M Xu Y	2008	J Microelectromech Systems2008，17，4：	1
6	A Micro machined flow shear stress sensor based on thermal transfer principles显示文摘	LIU C HUANG J B	1999	Microelectromech system1999，8，：	1
7	Etch rates for micromachining processing 显示文摘	WILLIAMS R MULLER R S	1996	Joumal of Microelectromechical Systems1996，5，：	1
8	A micromachined flow shear stress sensor based on thermal transfer principles显示文摘	Liu C Huang J B	1999	Microelectromech System1999，8，：	1
9	Parylene surfacemicromachined membranes for sensor applications 显示文摘	FAN Z F ENGEL J M CHEN J	2004	J Microelectromech System2004，13，3：	1
10	A new technique for measuring the mechanical properties of thin films显示文摘	Shape W N Yuan Jr Bin Edwards R L	1997	Journal of Microelectromech System1997，，6：	1
11	Design,fabrication, andtesting of micromachined silicone rubber membrane valves显示文摘	YANG X GROSJEAN C TAI Y C	1999	Journal of Microelectromech System1999，，8：	1
12	M TEST: a test chip for MEMS material property measurement using electrostati cally actuated test structures 显示文摘	OSTERBERG P M SENTURIA S D	1997	Microelectromech Systems1997，6，2：	1
13	显示文摘	Su Y C Lin L A	2004	Journal of Microelectromech System2004，13，：	1
14	Design and Characteriza-tion of Artificial Haircell Sensor for Flow Sensing with UltrahighVelocity and Angular Sensitivity 显示文摘	Chen N N Tucker C Engel J M	2007	Microelectromech Systems2007，16，5：	1
15	Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer显示文摘	Jo B H Van Lerberghe L M Motsegood K M	2000	Journal of Microelectromech Systems2000，9，1：	1
16	Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication 显示文摘	Maruo S Kawata S	1998	J Microelectromech Systems1998，7，：	1
17	Micromachined low-loss microwave switches 显示文摘	YAO Z J CHEN S ESHELMAN S	1999	IEEE J Microelectromech Systems1999，8，2：	1
18	New thermoelectric components using microsystem technologies显示文摘	Bottner H	2004	J Microelectromech Systems2004，13，3：	1
19	Passive mixing in a three-dimensional serpentine microchannel显示文摘	Stremler M A Sharp K V	2000	Journal of Microelectromechical Systems2000，9，2：	1
20	A micro machined flow shear stress sensor based on thermal transfer principles显示文摘	LIU C HUANG J B	1999	Microelectromech System1999，8，：	1

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