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	题名	作者	年代	出处	被引量
1	Integrated Thermal and Mierocoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades 显示文摘	Lotters Joost C Lammerink Theo S J Groenesteijn Jarno	2012	MICROMACHINES2012，3，1：	1
2	A hybrid thermopneumatic and electrostatic microvalve with integrated position sensing显示文摘	POTKAY J A WISE K D	2012	Micromachines2012，3，2：	1
3	Very high throughput electrical cell lysis and extraction of in- tracellular compounds using 3D Carbon electrodes in Lab-on- a-chip devices 显示文摘	MERNIER G MARTINEZ-DUARTE R LEHAL R	2012	Micromachines2012，3，3：	1
4	Bending of an ionconducting polymer film-electrode composite by an electric stimulus at low voltage 显示文摘	Oguro K Kawami Y Takenaka H	1992	Journal of Micromachine Society1992，5，：	1
5	Bending of an ion conducting polymer film- electrode composites by an electric stimulus at low voltage 显示文摘	Oguro K Kawami Y Takenaka H	1992	Journal of Micromachine Society1992，5，：	1
6	Preparation of thin lithium niobate layer on silicon wafer for wafer-level integration of acoustic devices and LSI显示文摘	KYEONG D P MASAYOSHI E TANAKA S	2010	IEEJ Transactions on Sensors and Micromachines2010，130，6：	1
7	A Hybrid thermopneumatic and electrostatic microvalve with integrated position sensing显示文摘	JOSEPH A P KENSALL D W	2012	Micromachines2012，3，2：	1
8	Micro/nano Spacecraft Thermal Control Using a MEMS - based Pumped Liquid Cooling System显示文摘	Gajanana C B Tricia W S	2001	SPIE Micromachining and Microfabrication2001，，：	1
9	An analytical model for CMUTs with square multilayer membranes using the ritz method显示文摘	ZHANG W ZHANG H JIN S J	2016	Micromachines2016，7，4：	1
10	Investigation of micro square structure fabrication by applying textured cutting tool in WEDM 显示文摘	Zhang J G Li Q S Zhang H	2015	Micromachines2015，6，10：	1
11	A new optimizer using particle swarm theory 显示文摘	Eberhart R C Kennedy J	1995	Proceedings of the 6th International Symposium on Micromachine Human Society1995，1，：	1
12	MEMS rotary engine power system显示文摘	Fernandez-Pello A C Pisano A P Fu K	2003	IEEJ Transactions on the Sensors and Micromachines2003，123，9：	1
13	Bending of an ion-conducting polymer film electrode composites by an electric stimulus at low voltage 显示文摘	Oguro K Kawami Y Takenaka H	1992	Journal of Micromachine Society1992，，5：	1
14	Spectrophotometric microdetermination of urea in a rice wine by using an immobilized acid urease column FIA system显示文摘	Iida Y Hara N Matsumoto K	2003	IEEJ Transactions on Sensors and Micromachines2003，123，8：	1
15	computer - to -plate printing using the grating light valve device 显示文摘	E Tamakia Y Hashimotola O Leung	2004	the proceedings of SPIE Micromachining and Microfabrication Symposium January2004，，：	1
16	Optimisation design of coupling region based on SOI micro-ring resonator 显示文摘	Yan S Li M Luo L	2014	Micromachines2014，6，1：	1
17	A muhifunctional sensor for auto- mobile engine condition monitoring显示文摘	Preethichandra Shida K	1999	Teej Transactions on Sensors and Micromachines1999，119，4：	1
18	Novel porous silicon formation without external contaet显示文摘	ALEXANDRA S JORG S BENECKE W	2004	Micromachining and Microfabrication Process Technology VI2004，，6：	1
19	Novel porous silicon formation without external contact显示文摘	ALEXANDRA S JORG S BENECKE W	2000	Micromachining and Microfabrication Process Technology Ⅵ2000，4174，6：	1
20	A Measurement Method for the Power Generation Characteristics of Piezoelectric Elements显示文摘	ICHIKI Masaaki MAEDA Ryutaro KITAHARA Tokio	2004	IEEJ Transactions on Sensors and Micromachines2004，124，1：	1

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