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| 1 | Influence of modulation ratio on structure and properties of nanoscale ZrB_2/ZrAlN multilayered coatings显示文摘ZrB2/ZrAlN multilayered coatings with various modulation ratios(t ZrB2:t ZrAlN)and constant modulation periods were prepared by magnetron sputtering system at room temperature.SEM,XRD,surface profiler and nano-indenter were employed to investigate the influences of tZ rB 2:tZrAlNon the microstructure and mechanical properties of the coatings.Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM.The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness(36.4 GPa)and critical fracture load(76.477 mN)with lower stress.The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties. | LI DeJun 1,KANG YuanBin 1,DONG Lei 1,DENG XiangYun 1,LIU Hao 2 &SUN XueLiang 2 1College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387,China 2 Department of Mechanical&Materials Engineering,University of Western Ontario,London ON,Canada | 2010 | Science China(Technological Sciences)2010，53，3： | 1 |
| 2 | 不同调制周期Cu/TaN多层膜的微结构与表面形貌显示文摘采用磁控溅射方法在Si(111)基底上沉积不同调制周期的Cu/TaN多层膜,用X射线衍射仪(XRD)与原子力显微镜(AFM)表征薄膜微结构与表面形貌,研究了不同调制周期L薄膜的微结构与表面形貌。结果表明:不同L的TaN调制层均为非晶结构,多晶Cu调制层的晶粒取向组成随着L改变而变化;Cu调制层的表面粗糙度R_(rms)大于TaN调制层的R_(rms);与Cu单层膜相比,最外层为Cu调制层的Cu/TaN多层膜的R_(rms)较小;与TaN单层膜相比,最外层为TaN调制层的Cu/nN多层膜的R_(rms)较大;随着L增加,多层膜与对应的单层膜之间的R_(rms)差值逐渐减小。 | 赵海阔 雒向东 | 2009 | 量子电子学报2009，26，1： | 0 |
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