维普期刊资源整合服务平台（V6.5）

173篇 您的检索式：作者名="Koshida"

选中清除导出查看参考文献查看引证文献引用追踪共9页首页上一页第1页下一页末页 /9 跳转

	题名	作者	年代	出处	被引量
1	Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays显示文摘Nanoscale lithographic technologies have been intensively studied for the development of the next generation of semiconductor manufacturing practices.While mask-less/direct-write electron beam(EB)lithography methods serve as a candidate for the upcoming 10-nm node approaches and beyond,it remains difficult to achieve an appropriate level of throughput.Several innovative features of the multiple EB system that involve the use of a thermionic source have been proposed.However,a blanking array mechanism is required for the individual control of multiple beamlets whereby each beamlet is deflected onto a blanking object or passed through an array.This paper reviews the recent developments of our application studies on the development of a high-speed massively parallel electron beam direct write(MPEBDW)lithography.The emitter array used in our study includes nanocrystalline-Si(nc-Si)ballistic electron emitters.Electrons are drifted via multiple tunnelling cascade transport and are emitted as hot electrons.The transport mechanism allows one to quickly turn electron beamlets on or off.The emitter array is a micro-electro-mechanical system(MEMS)that is hetero-integrated with a separately fabricated active-matrix-driving complementary metal-oxide semiconductor(CMOS)large-scale integration(LSI)system that controls each emitter individually.The basic function of the LSI was confirmed to receive external writing bitmap data and generate driving signals for turning beamlets on or off.Each emitted beamlet(10×10μm^(2))is converged to 10×10 nm^(2) on a target via the reduction electron optic system under development.This paper presents an overview of the system and characteristic evaluations of the nc-Si emitter array.We examine beamlets and their electron emission characteristics via a 1:1 exposure test.	Masayoshi Esashi Akira Kojima Naokatsu Ikegami Hiroshi Miyaguchi Nobuyoshi Koshida	2015	Microsystems & Nanoengineering2015，1，1：	4
2	Fabrication and quantum properties of nanestructured silicon 显示文摘	Koshida N Matsumoto N	2003	Material Science Engineering R2003，40，：	1
3	Quasiballistic Elec-tron Emission from Porous Silicon Diodes显示文摘	Koshida N Sheng X Komoda T	1999	Applied Surface Science1999，146，：	1
4	Olfactomedin 4 promotes s -phase transition in proliferation of pancreatic cancer cells 显示文摘	Kobayashi D Koshida S Moriai R	2007	Cancer Science2007，98，3：	1
5	Antitumor effect of reduction of150 - kDa oxygen - regulated protein expression on human prostatecancer cells显示文摘	Miyagi T Hori 0 Koshida K	2002	Int J Urol2002，9，10：	1
6	Specific overexpression of OLFM4 ( GW112/hGC - 1 ) mRNA in colon, breast and lung cancer tissues detected using quantitative analysis 显示文摘	Koshida S Kobayashi D Moriai R	2007	Cancer Science2007，98，3：	1
7	Olfactomedin 4 promotes S-phase transition in proliferation of pancreatic cancer cells显示文摘	Kobayashi D Koshida Sv Moriai Rv	2007	Cancer Sci2007，98，3：	1
8	Fate of the acrosome in ooplasm in pigs after IVF and ICSI显示文摘	Katayama M Koshida M Miyake M	2002	Hum Reprod2002，17，10：	1
9	Potential benefits of combining cytosine deaminase/5-fluoroeytosine gene therapy and irradiation for prostate cancer:experimental study显示文摘	Kato H Koshida K Yokoyama K	2002	Int J Urol2002，，10：	1
10	Correction of Mea-surement by HPGe detector for incident diagnostic X-ray photons显示文摘	Koshida K Shinizu K Kasuga T	2000	Preceeding of the Second Interna- tional Workshop on EGS2000，，：	1
11	Specific overexpression of OLFM4(GW112/HGC-1) mRNA in colon, breast and lung cancer tissues detected using quantitative analysis显示文摘	Koshida S Kobayashi Dv Moriai R	2007	Cancer Sci2007，98，3：	1
12	Highly Enhanced Photolumines-cence of As-Anodized and Electrochemically Oxidized Nanocrystalline P-Type Porous Silicon Treated by High-Pressure Water Vapor Annealing显示文摘	Gelloz B Koshida N	2006	Thin SolidFilms2006，508，：	1
13	TRAIL/Apo2L ligands induce apoptosis in malignant rhabdoid tumor cell lines显示文摘	YOSHIDA S NARITA T KOSHIDA S	2003	Pediatr Res2003，54，5：	1
14	Energy distribution of output electrons from a microchannel plate显示文摘	Koshida N	1985	Rev Sci lnstrum1985，56，7：	1
15	Influence of sulfur-oxidizing bacteria on the budget of sulfate in Yugama crater lake, Kusatsu-Shirane volcano, Japan 显示文摘	Takano B Koshida M Fujiwara Y Sugimori K Takayanagi S	1997	Biogeochemistry1997，38，3：	1
16	Gene therapy for prostate cancer using the cytosine deaminase/uracil phosphoribosyl transferase suicide system显示文摘	Miyagi T Koshida K Hori O	2003	J Gene Med2003，5，1：	1
17	Potential benefits of combing cytosine deaminase/5-fluorocytosine gene therapy and irradiation for prostate cancer:experimental study显示文摘	Kato H Koshida K Yokoyama K	2002	Int J Urol2002，9，10：	1
18	Gene Therapy for prostate cancer using the cytosine deaminase/uracil phosphoribosyltransferase suicide system显示文摘	Miyagi T Koshida K Hori O	2003	J Gene Med2003，5，1：	1
19	显示文摘	Koshida N Koyama H	1992	Appl Phys Lett1992，60，3：	1
20	Potential benefits of combining cytosine deaminase/5-fluorocytosine gene therapy and irradiation for prostate cancer: experimental study显示文摘	Kato H Koshida K Yokoyama K	2002	Int J Urol2002，9，10：	1

返回顶部每页显示：

共9页首页上一页第1页下一页末页 /9 跳转

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费

用户提示