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	题名	作者	年代	出处	被引量
1	The constituent equation of piezoelectric bi- morphs显示文摘	SMITS Jan G DALKE Susan I COONEY Thomas K	1991	Sensors and Actuator A1991，28，1：	2
2	Modified heterojunction based on zinc oxide thin films for hydrogen gas- sensor application显示文摘	Basu S Dutta A	1994	Sensors and Actuators1994，22，2：	2
3	The theoretical analysis on damping characteristics of resonant microbeam in vacuum显示文摘	Li Bing-qian Wu Hao-yang Zhu Chang-chun	1999	Sensors & Actuators A1999，70，：	2
4	A novel humidity- dectection mechanism for ZnO dense pellets显示文摘	Traversa E Bearzotti A	1995	Sensors and Actuators1995，23，23：	2
5	Theoretical basis for identification and measurement of air contaminants using an array of sensors having partly overlapping selectivities显示文摘	Stetter J R Zaromb S	1984	Sensors and Actuators1984，，6：	2
6	Characterization of food freshness with sensor arrays显示文摘	Schweizer-Berberich P M Vaihinger S Güpel W	1994	Sensors and Actuators1994，1819，：	2
7	An ultrasonic motor using a bending cylindrical transducer based on PZT thin film显示文摘	Morita T Kurosawa M Higuchi T	1995	Sensors and Actuators1995，50，12：	2
8	Micromachined corner cube reflectors as a communication link显示文摘	D S Gunawan L-Y Lin K S J Pister	1995	Sensors and Actuators A1995，47，13：	2
9	Selection of glass, compatibility anodic bonding conditions for silicon-glass capacitive and material sensors显示文摘	Rogers T Kowal J	1995	Sensors and Actuators A1995，47，：	2
10	Silicon-on-insulator(SOI)structures for pressure sensors显示文摘	Givargizov G I Limanoy A B Prjakhin G D	1991	Sensors and Actuators A1991，28，：	2
11	The NanoPirani-an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping显示文摘	PUERS R REYNTJENS S BRUYKER D D	2002	Sensor and Actuators A2002，9798，：	2
12	A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputting显示文摘	SHENG L Y TANG ZH WU J	1998	Sensors and Actuators B1998，49，：	2
13	Improvement of bonding time and quality of anodic bonding using the spiral arrangement of multiple point electrodes 显示文摘	Huang Jung-tang Yang Hsueh-an	2002	Sensors and Actuators A2002，102，：	2
14	Studies on SiO2-SiO2 bonding with hydrofluoric acid room temperature and low stress bonding technique for MEMS显示文摘	Nakanishi H Nishimoto T Nakamura R	2000	Sensors and Actuators2000，79，：	2
15	Soudium distribution in thin-film anodic bonding显示文摘	Visser M M Weichel S Storas P	2001	Sensors and Actuators A2001，92，：	2
16	Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates 显示文摘	Thomas M H Lee Lee D H Y	2002	Sensors and Actuators A2002，86，：	2
17	A study on a platinum-silicon carbide Schottky diodes as a hydrogen gas sensor 显示文摘	Kim C K Lee J H Lee Y H Cho N I and Kim D J	2000	Sensors and Actuators B2000，66，：	2
18	Polycrystalline silicon strain sensors 显示文摘	French P J Evans A G R	1985	Sensors and Actuators A1985，7，：	2
19	The TiO2-adding effects in WO3-based NO2 sensors prepared by coprecipitation and precipitation method显示文摘	Daesik L Sangdo H Sangmun L	2000	Sensors and Actuators2000，65，：	2
20	Response of nanocomposite pyroelectric detectors 显示文摘	CHEN Y CHAN W L H HUI N M	1998	Sensors and Actuators A1998，69，1：	2

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