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1042篇 您的检索式：期刊名="Microelectromechanical system"

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	题名	作者	年代	出处	被引量
1	Fabrication of 45° Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon显示文摘	Carola Strandman Lars Rosengren Hakan G A Elderstig	1995	Journal of Microelectromechanical Systems1995，4，4：	2
2	Corner-Cube Retroreflectors based on Structure-Assisted Assembly for Free-Space Optical Communication显示文摘	Lixia Zhou Joseph M Kahn Dristofer S J Pister	2003	Journal of Microelectromechanical Systems2003，12，3：	2
3	A MEMS Electromagnetic Optical Scanner for a Comercial Confocal Laser Scanning Microscope显示文摘	Hiroshi Miyajima Nobuyoshi Asaoka Toshihiko Isokawa	2003	Journal of Microelectromechanical Systems2003，12，3：	2
4	Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles 显示文摘	CHAN R LESNICK R BECHER D	2003	Journal of Microelectromechanical Systems2003，12，5：	1
5	Computation of static shapes and voltages for micromachineddeformable mirrors with nonlinear electrostatic actuators 显示文摘	Wang P K C Hadaegh F Y	1996	Journal of Microelectromechanical System1996，5，3：	1
6	The SiOG-based single-crystalline silicon (SCS) RF MEMS switch with uniform characteristics 显示文摘	Park Jae-Hyoung Baek Chang-Wook	2004	Journal of Microelectromechanical System2004，13，6：	1
7	A high-power MEMS electric induction motor 显示文摘	Livermore C Forte A R Lyszczarz T	2004	Journal of Microelectromechanical Systems2004，13，3：	1
8	Micromaehined piezoresistive accelerometers based on an asymmetrically gapped cantilever 显示文摘	LI Y ZHENG Q HU Y	2011	Journal of Microelectromechanical Systems2011，20，1：	1
9	Nonlinear limits for single- crystal silicon microresonators显示文摘	Kaajakari V Mattila T Oja A	2004	Microelectromechanical Systems Journal of2004，13，5：	1
10	A vacuum packaged surface micromachined resonant accelerometer显示文摘	Ashwin A Seshia Moorthi Palaniapan Trey A Roessig	2002	Journal of Microelectromechanical Systems2002，11，6：	1
11	Measurement system for full three-dimensiona motion characterization of MEMS显示文摘	Rembe C Kant R Muller R S	2002	Journal of Microelectromechanical Systems2002，11，5：	1
12	A liquid-filled microrelay with a moving mercury microdrop 显示文摘	SIMON J SAFFER S KIM C J	1997	Journal of Microelectromechanical Systems1997，6，3：	1
13	MEMS resonators that are robust to process-Induced feature width variations显示文摘	Liu R Paden B Turner K	2002	Journal of Microelectromechanical Systems2002，11，5：	1
14	An electromagnetic micro power generator for low-frequency environmentalvibrations based on the frequency upconversion technique 显示文摘	Sari I Balkan T Kfilah H	2010	Journal of Microelectromechanical systems2010，19，1：	1
15	Feasibility of micro power supplies for MEMS 显示文摘	KOENEMAN P B BUSCH-VISHNIAC I J WOOD K L	1997	Journal of microelectromechanical systems1997，6，4：	1
16	A high sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages 显示文摘	Dokmeci M Najafi K	2001	IEEE/ASME Journal of Microelectromechanical Systems2001，10，：	1
17	Design and fabrication aspects of an s-shaped film actuator based DC to RF MEMS switch 显示文摘	OBERHAMMER J STEMME G	2004	Journal of Microelectromechanical Systems2004，13，3：	1
18	Linear microvibromotor for positioning optical components 显示文摘	Daneman M J Tien N C Solgaard O	1996	Journal of Microelectromechanical System1996，5，3：	1
19	Nonlinear dynamic characteristics of piezoelectric bending actuators under strong applied electric field显示文摘	YAO L Q ZHANG J G LU L	2004	Journal of Microelectromechanical Systems2004，13，4：	1
20	High Capacitance Ratio Warped Beam Capacitive MEMS Switch Designs显示文摘	A1-Dahleh R Mansour R R	2010	Microelectromechanical Systems2010，19，3：	1

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